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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1278-1282

Evaluation of ellipsometric porosimetry for in-line characterization of ultra low-κ dielectrics

(9) Licitra, C a Bertin, F a Darnon, M b Chevolleau, T b Guedj, C a Cetre, S a Fontaine, H a Zenasni, A a Chapelon, L L c

a CEA LETI (France)

b CNRS (France)

c STMICROELECTRONICS (France)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION CYCLE; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC SPECTRA; IN-LINE; INTEGRATION PROCESS; INTER-METAL DIELECTRICS; NON-DESTRUCTIVE TECHNIQUE; PORE FRACTION; PORE-SEALING; PROCESS INDUCED DAMAGE; ULK MATERIALS;

ADSORPTION; DESORPTION; INTEGRATION; PORE SIZE; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC MATERIALS;

EID: 48949122214 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.200777776 Document Type: Conference Paper

Times cited : (14)

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