Electrical investigation of the silicon/diamond interface

Microelectronic Engineering

Volumn 36, Issue 1-4, 1997, Pages 245-248

  Edholm, B ^a   Olsson, J ^a   Keskitalo, N ^a   Vestling, L ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR JUNCTIONS; SILICA; ELECTRIC CONDUCTIVITY OF SOLIDS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING DIAMONDS; SEMICONDUCTING FILMS; SEMICONDUCTOR DIODES;

SILICON ON DIAMOND (SOD) DIODES; ELECTRICAL DEGRADATION;

SEMICONDUCTOR DIODES; SILICON ON INSULATOR TECHNOLOGY;

EID: 0031150252     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(97)00057-9     Document Type: Article

References (8)

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7. K. V. Ravi, et al., Proc. First Int. Symp. Diamond and Diamond-Like Films, 24-37 (1989).
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