Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection

Measurement Science and Technology

Volumn 19, Issue 8, 2008, Pages

  Jiang, Y G ^a   Ono, T ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Nanocantilever; NEMS; Piezoresistive cantilever; Spin on diffusion

Indexed keywords

NANOSTRUCTURED MATERIALS; NEMS;

BORON DOPED LAYERS; FABRICATION AND CHARACTERIZATIONS; FAST ATOM BEAMS; LASER DOPPLER VIBROMETERS; PIEZO-RESISTIVE CANTILEVERS; RESONANCE RESPONSE; SPIN-ON DIFFUSION; ULTRA SENSITIVES;

NANOCANTILEVERS;

EID: 48849087993     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/8/084011     Document Type: Article

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