Volume manufacturing aspects of BAW filters on a production cluster system

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 210-214

  Lanz, Roman ^a   Lambert, Christian ^a  

^a Central R and D   (Liechtenstein)

Author keywords

AlN sputtering; BAW manufacturing; BAW technology; Volume production

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM COMPOUNDS; ELECTRODES; PIEZOELECTRIC DEVICES; SPUTTER DEPOSITION;

ALN SPUTTERING; BAW MANUFACTURING; BAW TECHNOLOGY; VOLUME PRODUCTION;

ACOUSTIC BULK WAVE DEVICES;

EID: 33847155410     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602833     Document Type: Conference Paper

References (7)

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