Electrical characteristics of a millisecond pulsed glow discharge

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 63, Issue 6, 2008, Pages 630-637

  Fliegel, Daniel ^a   Günther, Detlef ^a  

^a LABORATORY OF INORGANIC CHEMISTRY   (Switzerland)

Author keywords

Breakdown; Discharge frequency; Paschen curve; Pulsed glow discharge

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DATA ACQUISITION; ELECTRIC BREAKDOWN; LASER PULSES; MASS SPECTROMETRY; NATURAL FREQUENCIES; PRESSURE MEASUREMENT;

DISCHARGE FREQUENCIES; PASCHEN CURVES; PULSED GLOW DISCHARGES;

GLOW DISCHARGES;

EID: 46549087799     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2008.03.009     Document Type: Article

References (58)

1. Angeli J., Bengtson A., Bogaerts A., Hoffmann V., Hodoroaba V.D., and Steers E. Glow discharge optical emission spectrometry: moving towards reliable thin film analysis - a short review. J. Anal. At. Spectrom. 6 (2003) 670-679
2. Bogaerts A., and Gijbels R. Fundamental aspects and applications of glow discharge spectrometric techniques. Spectrochim. Acta Part B 1 (1998) 1-42
3. Craggs J.D., and Meek J.M. The initiation of low pressure glow discharges. Proc. Phys. Soc. London 346 (1948) 327-340
4. Druyvesteyn M.J., and Penning F.M. The mechanism of electrical discharges in gases of low pressure. Rev. Mod. Phys. 2 (1940) 0087-0174
5. Yang C.L., Mohill M., and Harrison W.W. Microsecond-pulsed Grimm glow discharge as a source for time-of-flight mass spectrometry. J. Anal. At. Spectrom. 9 (2000) 1255-1260
6. Yang C.L., Oxley E., and Harrison W.W. A double pulse method for glow discharge enhancement. J. Anal. At. Spectrom. 10 (2001) 1131-1134
7. Yang C.L., Ingeneri K., and Harrison W.W. A pulsed Grimm glow discharge as an atomic emission source. J. Anal. At. Spectrom. 4 (1999) 693-698
8. Lewis C.L., Oxley E.S., Ban C.K., Steiner R.E., and King F.L. Determination of Ca-40(+) in the presence of Ar-40(+): an illustration of the utility of time-gated detection in pulsed glow discharge mass spectrometry. Anal. Chem. 1 (1999) 230-234
9. Fliegel D., Waddell R., Majidi V., Günther D., and Lewis C.L. Quantification of aromatic and halogenated hydrocarbons and alcohol mixtures at the elemental, structural, and parent molecular ion level. Anal. Chem. 6 (2005) 1847-1852
10. Lewis C.L., Moser M.A., Hang W., Dale D.E., Hassell D.C., and Majidi V. Influence of discharge parameters on real-time chemical speciation for gas chromatography pulsed glow discharge plasma time-of-flight mass spectrometry. J. Anal. At. Spectrom. 6 (2003) 629-636
11. Lewis C.L., Moser M.A., Dale D.E., Hang W., Hassell C., King F.L., and Majidi V. Time-gated pulsed glow discharge: real-time chemical speciation at the elemental, structural, and molecular level for gas chromatography time-of-flight mass spectrometry. Anal. Chem. 9 (2003) 1983-1996
12. Majidi V., Moser M., Lewis C., Hang W., and King F.L. Explicit chemical speciation by microsecond pulsed glow discharge time-of-flight mass spectrometry: concurrent acquisition of structural, molecular and elemental information. J. Anal. At. Spectrom. 1 (1999) 19-25
13. Bernhard M., Brinckman F.E., and Sadler P.J. The Importance of Chemical "Speciation" in Environmental Processes (1986)
14. Broekaert J.A.C., Gücer S., and Adams F. Metal Speciation in the Environment (1990)
15. Jackson G.P., and King F.L. Bulk plasma properties in the pulsed glow discharge. Spectrochim. Acta Part B 8 (2003) 1417-1433
16. Bogaerts A., Gijbels R., and Jackson G.P. Modeling of a millisecond pulsed glow discharge: investigation of the afterpeak. J. Anal. At. Spectrom. 6 (2003) 533-548
17. Fliegel D., Fuhrer K., Gonin M., and Günther D. Evaluation of a pulsed glow discharge time-of-flight mass spectrometer as a detector for gas chromatography and the influence of the glow discharge source parameters on the information volume in chemical speciation analysis. Anal. Bioanal Chem. 1 (2006) 169-179
18. Marcus R.K., and Broekaert J.A.C. Glow Discharge Plasmas in Analytical Spectroscopy (2003)
19. Marcus R.K. Glow Discharge Spectroscopy (1993), Plenum press, New York
20. Chapmann B. Glow Discharge Processes (1980), Wiley-Interscience, New York
21. Li L., Millay J.T., Turner J.P., and King F.L. Millisecond pulsed radio frequency glow discharge time of flight mass spectrometry: temporal and spatial variations in molecular energetics. J. Am. Soc. Mass. Spectrom. 1 (2004) 87-102
22. Gamez G., Bogaerts A., and Hieftje G.M. Temporal and spatially resolved laser-scattering plasma diagnostics for the characterization of a ms-pulsed glow discharge. J. Anal. At. Spectrom. 3 (2006) 350-359
23. Tian X.B., and Chu P.K. Experimental investigation of the electrical characteristics and initiation dynamics of pulsed high-voltage glow discharge. J. Phys. D: Appl. Phys. 3 (2001) 354-359
24. Bogaerts A., and Gijbels R. Hybrid Monte Carlo - fluid model for a microsecond pulsed glow discharge. J. Anal. At. Spectrom. 8 (2000) 895-905
25. Raizer Y.P. Gas Discharge Physics (1991), Springer, Berlin
26. Bokhan A.P., Bokhan P.A., and Zakrevsky D.E. Peculiarities of electron emission from the cathode in an abnormal glow discharge. Appl. Phys. Lett. 15 (2005)
27. Auday G., Guillot P., Galy J., and Brunet H. Experimental study of the effective secondary emission coefficient for rare gases and copper electrodes. J. Appl. Phys. 11 (1998) 5917-5921
28. Chutopa Y., Yotsombat B., and Brown I.G. Measurement of secondary electron emission yields. IEEE Trans. Plasma Sci. 5 (2003) 1095-1099
29. Phelps A.V., and Petrovic Z.L. Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons. Plasma Sources Sci. Technol. 3 (1999) R21-R44
30. Bogaerts A., and Gijbels R. The ion- and atom-induced secondary electron emission yield: numerical study for the effect of clean and dirty cathode surfaces. Plasma Sources Sci. Technol. 1 (2002) 27-36
31. Bokhan A.P., Bokhan P.A., and Zakrevsky D.E. Electron emission from a cathode doped by fast particles of a working gas. Tech. Phys. 9 (2005) 1233-1235
32. Bogaerts A., Gijbels R., Gamez G., and Hieftje G.M. Fundamental studies on a planar-cathode direct current glow discharge. Part II: numerical modeling and comparison with laser scattering experiments. Spectrochim. Acta Part B 4 (2004) 449-460
33. Gamez G., Bogaerts A., Andrade F., and Hieftje G.M. Fundamental studies on a planar-cathode direct current glow discharge. Part I: characterization via laser scattering techniques. Spectrochim. Acta Part B 4 (2004) 435-447
34. Budtz-Jorgensen C.V., Bottiger J., and Kringhoj P. Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges. Surf. Coat. Technol. 1 (2001) 104-110
35. Pejovic M.M., Ristic G.S., and Karamarkovic J.P. Electrical breakdown in low pressure gases. J. Phys. D: Appl. Phys. 10 (2002) R91-R103
36. Eichhorn H., Schoenbach K.H., and Tessnow T. Paschen Law for a hollow-cathode discharge. Appl. Phys. Lett. 18 (1993) 2481-2483
37. Mixon P.D., Griffin S.T., and Williams J.C. Breakdown voltage scaling characteristics of an Argon hollow-cathode discharge. J. Appl. Spectrosc. 10 (1993) 1567-1570
38. Bokhan P.A., and Zakrevsky D.E. Surface condition and electron emission from cold cathodes in vacuum and in noble gas glow discharge. Tech. Phys. 1 (2007) 104-112
39. Smith H.B., Charles C., and Boswell R.W. Breakdown behavior in radio-frequency argon discharges. Phys. Plasmas 3 (2003) 875-881
40. Guillot P., Belenguer P., Therese L., Lavoine V., and Chollet H. Secondary electron emission coefficients of standard samples for GDOES. Surf. Interface Anal. 7 (2003) 590-592
41. Brown S.C., and Allis W.P. Basic Data of Electrical Discharges (1956), MIT, Cambridge
42. Garamoon A.A., Samir A., Elakshar F.F., and Kotp E.F. Electrical characteristics of a DC glow discharge Plasma Sources. Sci. Technol. 3 (2003) 417-420
43. Wagenaars M.D., Bowden M.D., and Kroesen G.M.W. Plasma emission imaging of a low-pressure argon breakdown, Plasma Sources. Sci. Technol. (2005) 342-350
44. Stepanovic O.M., Radovic M.K., and Maluckov C.A. The glow duration time influence on the ionization rate detected in the diodes filled with noble gases on mbar pressures. Facta Universitatis, Phys. Chem. Technol. 5 (2003) 259-267
45. Popovic I., Rajovic V., and Zlatanovic M. Dynamic Voltage-Current Characteristics of Unipolar Pulse Glow Discharge (2005) 315-320
46. Tong S.L., and Harrison W.W. Glow-discharge sputtering of chromium and niobium disk cathodes in Argon. Anal. Chem. 12 (1984) 2028-2033
47. Fang D., and Marcus R.K. Parametric evaluation of sputtering in a planar, diode glow-discharge.1. Sputtering of oxygen-free hard copper (Ofhc). Spectrochim. Acta Part B 12 (1988) 1451-1460
48. Dogan M., Laqua K., and Massmann H. Spectrochemical analysis with glow discharge lamp as light source.1. Electric properties, sample decomposition and spectral characteristic. Spectrochim. Acta Part B 10 (1971) 631-&
49. Tian X.B., Tang B.Y., and Chu P.K. Accurate determination of pulsed current waveform in plasma immersion ion implantation processes. J. Appl. Phys. 7 (1999) 3567-3570
50. Jackson G.P., Lewis C.L., Doorn S.K., Majidi V., and King F.L. Spectral, spatial and temporal characteristics of a millisecond pulsed glow discharge: metastable argon atom production. Spectrochim. Acta Part B (2001) 2449-2464
51. Lewis C.L., Jackson G.P., Doorn S.K., Majidi V., and King F.L. Spectral, spatial and temporal characterization of a millisecond pulsed glow discharge: copper analyte emission and ionization. Spectrochim. Acta Part B 5 (2001) 487-501
52. Bogaerts A., and Gijbels R. Two-dimensional model of a direct current glow discharge: description of the argon metastable atoms, sputtered atoms, and ions. Anal. Chem. 15 (1996) 2676-2685
53. Pan C.K., and King F.L. Ion formation processes in the afterpeak time regime of pulsed glow-discharge plasmas. J. Am. Soc. Mass Spectrom. 9 (1993) 727-732
54. Bogaerts A. The afterglow mystery of pulsed glow discharges and the role of dissociative electron-ion recombination. J. Anal. At. Spectrom. (2007) 502-512
55. Levy M.K., Serxner D., Angstadt A.D., Smith R.L., and Hess K.R. Optical investigations of excitation processes responsible for ionized sputtered species in a low-pressure, low current, coaxial geometry glow-discharge. Spectrochim. Acta Part B 2 (1991) 253-267
56. Hardy K.A., and Sheldon J.W. Metastable atom density in helium, neon, and argon glow-discharges. J. Appl. Phys. 12 (1982) 8532-8536
57. Jackson G.P., and King F.L. Probing excitation/ionization processes in millisecond-pulsed glow discharges in argon through the addition of nitrogen. Spectrochim. Acta Part B 2-3 (2003) 185-209
58. Bogaerts A., and Gijbels R. Effects of adding hydrogen to an argon glow discharge: overview of relevant processes and some qualitative explanations. J. Anal. At. Spectrom. 4 (2000) 441-449