Fundamental aspects and applications of glow discharge spectrometric techniques

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 53, Issue 1, 1998, Pages 1-42

  Bogaerts, Annemie ^a   Gijbels, Renaat ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Fundamental aspects; Glow discharge spectrometry; Plasma processes

Indexed keywords

ELECTRIC FIELDS; GLOW DISCHARGES; MATHEMATICAL MODELS; PLASMA COLLISION PROCESSES; PLASMA DIAGNOSTICS;

GLOW DISCHARGE SPECTROMETRY;

SPECTROMETRY;

EID: 0031652366     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(97)00122-5     Document Type: Review

References (242)

1. A. Bogaerts, R. Gijbels, Modeling of metastable argon atoms in a direct current glow discharge, Phys. Rev. A 52 (1995) 3743.
2. R.J. Carman, A simulation of electron motion in the cathode sheath region of a glow discharge in argon, J. Phys. D 22 (1989) 55.
3. H.A. Hyman, Electron impact ionization cross-sections for excited states of the rare gases (Ne, Ar, Kr, Xe), cadmium and mercury, Phys. Rev. A 20 (1979) 855.
4. E. Eggarter, Comprehensive optical and collision data for radiation action II. Ar*, J. Chem. Phys. 62 (1975) 833.
5. 2 and argon ions and neutrals in Ar for energies from 0.1 eV to 10 keV, J. Chem. Phys. Ref. Data 20 (1991) 557.
6. A. Bogaerts, R. Gijbels, The role of fast argon ions and atoms in the ionization of argon in a direct current glow discharge: a mathematical simulation, J. Appl. Phys. 78 (1995) 6427.
7. C.M. Ferreira, A. Ricard, Modelling of the low-pressure argon positive column, J. Appl. Phys. 54 (1983) 2261.
8. A.V. Phelps, The application of scattering cross sections to ion flux models in discharge sheaths, J. Appl. Phys. 76 (1994) 747.
9. B. Chapman, Glow Discharge Processes, Wiley, New York, 1980.
10. A. Bogaerts, R. Gijbels, J. Vlcek, Collisional-radiative model for an argon glow discharge, J. Appl. Phys. submitted.
11. +, Ar, Ar*, Hg and Hg*, Phys. Lett. 8 (1964) 260.
12. A.Z. Msezane, R.J.W. Henry, Electron impact excitation of atomic copper, Phys. Rev. A 33 (1986) 1631.
13. L.A. Riseberg, W.F. Parks, L.D. Schearer, Penning ionization of Zn and Cd by noble gas metastable atoms, Phys. Rev. A 8 (1973) 1962.
14. M. Bourène, J. Le Calve, De-excitation cross sections of metastable argon by various atoms and molecules, J. Chem. Phys. 58 (1973) 1452.
15. S. Inaba, T. Goto, S. Hattori, Determination of the Penning excitation cross sections of Mg atoms by He, Ne and Ar metastable atoms, J. Phys. Soc. Jap. 52 (1983) 1164.
16. J.W. Coburn, E. Kay, Plasma diagnostics of an RF-sputtering glow discharge, Appl. Phys. Lett. 18 (1971) 435.
17. M.K. Levy, D. Serxner, A.D. Angstadt, R.L. Smith, K.R. Hess, Optical investigations of excitation processes responsible for ionized sputtered species in a low pressure, low current coaxial geometry glow discharge, Spectrochim. Acta B 46 (1991) 253.
18. A. Bogaerts, R. Gijbels, Relative sensitivity factors in glow discharge mass spectrometry: the role of charge transfer ionization, J. Analyt. Atom. Spectrom. 11 (1996) 841.
19. P.B. Farnsworth, J.P. Walters, Excitation processes in an RF-boosted, pulsed hollow cathode lamp, Spectrochim. Acta B 37 (1982) 773.
20. E.B.M. Steers, R.J. Fielding, Charge transfer excitation processes in the Grimm lamp, J. Analyt. Atom. Spectrom. 2 (1987) 239.
21. E.B.M. Steers, F. Leis, Excitation of the spectra of neutral and singly ionized atoms in the Grimm-type discharge lamp, with and without supplementary microwave excitation, Spectrochim. Acta B 46 (1991) 527.
22. E.B.M. Steers, A.P. Thorne, Application of high-resolution fourier transform spectrometry to the study of glow discharge sources. Part 1. Excitation of iron and chromium spectra in a microwave boosted glow discharge source, J. Analyt. Atom. Spectrom. 8 (1993) 309.
23. K. Wagatsuma, K. Hirokawa, Classification of singly ionized iron emission lines in the 160-250 nm wavelength region from Grimm-type glow discharge plasma, Spectrochim. Acta B 51 (1996) 349.
24. R.S. Hudson, L.L. Skrumeda, W.J. Whaling, Fe II level populations in a hollow cathode discharge, J. Quant. Spectrosc. Radiat. Transfer 38 (1987) 1.
25. + with cadmium, J. Phys. B 18 (1985) 3618.
26. + with zinc, J. Phys. B 19 (1986) 2695.
27. A.K. Belyaev, Charge exchange with ion excitation in collisions of helium ions with mercury atoms, J. Phys. B 26 (1993) 3877.
28. + ions and cesium atoms at near-thermal ion-atom energies, Phys. Rev. A 28 (1983) 1817.
29. + + Rb at thermal energies, Opt. Spectrosc. 49 (1980) 450.
30. V.A. Kartazaev, Y.A. Piotrovskii, Y.A. Tolmachev, Charge exchange and Penning ionization in a pulsed discharge in a mixture of neon and zinc, Opt. Spectrosc. 44 (1978) 362.
31. S.C. Rae, R.C. Tobin, Sputtering in the presence of a rapid gas flow, J. Appl. Phys. 64 (1988) 1418.
32. 3S metastables by calcium and strontium metal vapors, J. Appl. Phys. 49 (1978) 3088.
33. E.M. van Veldhuizen, F.J. de Hoog, Analysis of a Cu-Ne hollow cathode glow discharge at intermediate currents, J. Phys. D 17 (1984) 953.
34. K. Danzmann, M. Kock, Population densities in a titanium hollow cathode, J. Phys. B 14 (1981) 2989.
35. L. Csillag, M. Janossy, K. Rozsa, T. Salamon, Near infrared CW laser oscillation in Cu II, Phys. Lett. A 50 (1974) 13.
36. A. Bogaerts, R. Gijbels, W.J. Goedheer, Hybrid Monte Carlo-fluid model of a direct current glow discharge, J. Appl. Phys. 78 (1995) 2233.
37. A. Bogaerts, R. Gijbels, W.J. Goedheer, Two-dimensional model of a direct current glow discharge: description of the electrons, argon ions and fast argon atoms, Analyt. Chem. 68 (1996) 2296.
38. A. Bogaerts, R. Gijbels, Role of sputtered Cu atoms and ions in a direct current glow discharge: combined fluid and Monte Carlo model, J. Appl. Phys. 79 (1996) 1279.
39. A. Bogaerts, R. Gijbels, Two-dimensional model of a direct current glow discharge: description of the argon metastable atoms, sputtered atoms and ions, Analyt. Chem. 68 (1996) 2676.
40. E.W. McDaniel, J.B.A. Mitchell, M.E. Rudd, Atomic Collisions: Heavy Particle Projectiles, Wiley, New York, 1993.
41. H.S.W. Massey, E.H.S. Burhop, Electronic and Ionic Impact Phenomena, Oxford University Press, Oxford, 1952.
42. V.S. Vorob'ev, Kinetics of ionization and recombination in low-temperature plasmas, Plasma Sources Sci. Technol. 4 (1995) 163.
43. M.A. Biondi, Studies of the mechanism of electron-ion recombination I., Phys. Rev. 129 (1963) 1181.
44. R.F. Stebbings, Gaseous and surface reactions involving helium metastable atoms and resonance photons, Proc. Roy. Soc. Lond. A 241 (1957) 270.
45. J.B. Hasted, Collisions of metastable atoms, J. Appl. Phys. 30 (1959) 22.
46. H. Oechsner, Electron yields from clean polycrystalline metal surfaces by noble-gas-ion bombardment at energies around 1 keV, Phys. Rev. B 17 (1978) 1052.
47. A.V. Phelps, private communication.
48. W.W. Harrison, B.L. Bentz, Glow discharge mass spectrometry, Prog. Analyt. Spectrosc. 11 (1988) 53.
49. R.V. Stuart, G.K. Wehner, Energy distribution of sputtered Cu atoms, J. Appl. Phys. 35 (1964) 1819.
50. P. Sigmund, Theory of sputtering. 1. Sputtering yield of amorphous and polycrystalline targets, Phys. Rev. 184 (1969) 383.
51. Y. Yamamura, N. Matsunami, N. Itoh, Theoretical studies on an empirical formula for sputtering yield at normal incidence, Radiat. Effic. 71 (1983) 65.
52. N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, H. Tawara, Energy dependence of the ion-induced sputtering yields of monoatomic solids, Atom. Data Nucl. Data Tables 31 (1984) 1.
53. M.T. Robinson, I.M. Torrens, Computer simulation of atomic displacement cascades in solids in the binary collision approximation, Phys. Rev. B 9 (1974) 5008.
54. H.A. Oechsner, Sputtering - review of some experimental and theoretical aspects, Appl. Phys. 8 (1975) 185.
55. A. Benninghoven, F.G. Rüdenauer, H.W. Werner, Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends, Wiley, New York, 1987.
56. E. W. McDaniel, Collision Phenomena in Ionized Gases, Wiley, New York, 1964.
57. G. Francis, The glow discharge at low pressure, in: S. Flügge (Ed.), Handbuch der Physik, vol. 22, Springer, Berlin, 1956.
58. D.B. Graves, K.F. Jensen, A continuum model of DC and RF discharges, IEEE Trans. Plasma Sci. PS-14 (1986) 78.
59. J.P. Boeuf, A two-dimensional model of DC glow discharges, J. Appl. Phys. 63 (1988) 1342.
60. M. Meyyappan, T.R. Govindan, Radio frequency discharge modeling: moment equations approach, J. Appl. Phys. 74 (1993) 2250.
61. J.D.P. Passchier, W.J. Goedheer, Relaxation phenomena after laser-induced photodetachment in electronegative RF discharges, J. Appl. Phys. 73 (1993) 1073.
62. J.D.P. Passchier, W.J. Goedheer, A two-dimensional fluid model for an argon RF discharge, J. Appl. Phys. 74 (1993) 3744.
63. I. Abril, Alacant: modeling of glow discharge sputtering systems, Comput. Phys. Commun. 51 (1988) 413.
64. J.P. Boeuf, E. Marode, A Monte Carlo analysis of an electron swarm in a non-uniform field: the cathode region of a glow discharge in helium, J. Phys. D 15 (1982) 2169.
65. 4 capacitively coupled rf discharges, IEEE Trans. Plasma Sci. 14 (1986) 188.
66. Z. Donko, K. Rozsa, R.C. Tobin, Monte Carlo analysis of the electrons' motion in a segmented hollow cathode discharge, J. Phys. D 29 (1996) 105.
67. M. Surendra, D.B. Graves, G.M. Jellum, Self-consistent model of a direct current glow discharge: treatment of fast electrons, Phys. Rev. A 41 (1990) 1112.
68. J.-P. Boeuf, L.C. Pitchford, Pseudospark discharges via computer simulation, IEEE Trans. Plasma Sci. PS-19 (1991) 286.
69. A. Fiala, L.C. Pitchford, J.P. Boeuf, Two-dimensional, hybrid model of low-pressure glow discharges, Phys. Rev. E 49 (1994) 5607.
70. A. Bogaerts, M. van Straaten, R. Gijbels, Monte Carlo simulation of an analytical glow discharge: motion of electrons, ions and fast neutrals in the cathode dark space, Spectrochim. Acta B 50 (1995) 179.
71. A. Bogaerts, M. van Straaten, R. Gijbels, Description of the thermalization process of the sputtered atoms in a glow discharge, using a three-dimensional Monte Carlo method, J. Appl. Phys. 77 (1995) 1868.
72. A. Bogaerts, R. Gijbels, Mathematical description of a direct current glow discharge in argon, Fresenius' J. Analyt. Chem. 355 (1996) 853.
73. A. Bogaerts, Mathematical modeling of a direct current glow discharge in argon, Ph.D. Dissertation, University of Antwerp, 1996.
74. A. Bogaerts, R. Gijbels, Computer simulation of an analytical direct current glow discharge in argon: influence of the cell dimensions on the plasma quantities, J. Analyt. Atom. Spectrom. 12 (1997) 751.
75. A. Bogaerts, R. Gijbels, Modeling of glow discharge sources with flat and pin cathodes and implications for mass spectrometric analysis, J. Am. Soc. Mass Spectrom. 8 (1997) 1021.
76. F.W. Aston, Experiments on the length of the cathode dark space with varying current densities and pressures in different gases, Proc. Roy. Soc. Lond. Ser. A 79 (1907) 80.
77. A. Bogaerts, R.D. Guenard, B.W. Smith, J.D. Winefordner, W.W. Harrison, R. Gijbels, Three-dimensional density profiles of the argon metastable atoms in a direct current glow discharge: experimental study and comparison with calculations, Spectrochim. Acta B 52 (1997) 219.
78. A. Bogaerts, E. Wagner, B.W. Smith, J.D. Winefordner, D. Pollmann, W.W. Harrison, R. Gijbels, Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations, Spectrochim. Acta B 52 (1997) 205.
79. M. van Straaten, A. Bogaerts, R. Gijbels, Experimental determination of energy distributions of ions bombarding the cathode surface in a glow discharge, Spectrochim. Acta B 50 (1995) 583.
80. A. Bogaerts, R. Gijbels, Calculation of crater profiles on a flat cathode in a direct current glow discharge and comparison with experiment, Spectrochim. Acta B 52 (1997) 765.
81. C. Jonkers, Analyse van metalen en metaaloppervlakken met glimontladingsmassaspectrometrie, Ph.D. Dissertation, University of Antwerp, 1995.
82. E. Dwight, B.W. Billings, D.F. Bleil, R.K. Cook, H.M. Crosswhite, H.P.R. Frederikse, R.B. Lindsay, J.B. Marion, M.W. Zemansky, American Institute of Physics Handbook, McGraw-Hill, New York, 1972.
83. W. Vieth, J.C. Huneke, Relative sensitivity factors in glow discharge mass spectrometry, Spectrochim. Acta B 46 (1991) 137.
84. A. Bogaerts, R. Gijbels, Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: a mathematical simulation, Spectrochim. Acta B in press.
85. A. Bogaerts, R. Gijbels, Comparison of argon and neon as discharge gases in a direct current glow discharge: a mathematical simulation, Spectrochim. Acta B 52 (1997) 553.
86. A. Vertes, R. Gijbels, F. Adams, Diagnostics and modeling of plasma processes in ion sources, Mass Spectrom. Rev. 9 (1990) 71.
87. I. Langmuir, H. Mott-Smith, Studies of electric discharges in gases at low pressures, Part I-V, General Electric Review, XXVII, nos 7, 8, 9, 11, 12 (1924).
88. D. Fang, R.K. Marcus, Use of a cylindrical Langmuir probe for the characterization of charged particle populations in a planar, diode glow discharge device, Spectrochim. Acta B 45 (1990) 1053.
89. I.D. Sudit, R.C. Woods, A workstation based Langmuir probe system for low-pressure DC plasmas, Rev. Sci. Instrum. 64 (1993) 2440.
90. A. Bogaerts, A. Quentmeier, N. Jakubowski, R. Gijbels, Plasma diagnostics of analytical glow discharges in argon and in neon: Langmuir probe and optical emission spectrometry measurements, Spectrochim. Acta B 50 (1995) 1337.
91. Y. Ye, R.K. Marcus, Application of a tuned Langmuir probe for the diagnostic study of radio frequency glow discharges: instrumentation and theory, Spectrochim. Acta B 50 (1995) 997.
92. M.J. Heintz, G.M. Hieftje, Langmuir probe measurements of a pulsed and steady-state RF glow discharge source and of an RF planar magnetron source, Spectrochim. Acta B 51 (1996) 1629.
93. Y. Ye, R.K. Marcus, Effects of limiting orifice (anode) geometries on charged particle characteristics in an analytical radio frequency glow discharge as determined by Langmuir, current and voltage probes, J. Analyt. Atom. Spectrom. 12 (1997) 33.
94. P.A. Buger, S. El. Alfy, Messung von Anregungstemperaturen in einer Glimmentladingslampe, Z. Naturforsch. 30a (1975) 466.
95. D.M. Mehs, T.M. Niemczyk, Excitation temperatures in the hollow cathode discharge, Appl. Spectrosc. 35 (1981) 66.
96. M. Kubota, Y. Fujishiro, R. Ishida, Selection of spectral lines and transition probability data in plasma temperature measurements by photoelectric scanning spectrometry, Spectrochim. Acta B 36 (1981) 697.
97. M. Kuraica, N. Konjevic, M. Platisa, D. Pantelic, Plasma diagnostics of the Grimm-type glow discharge, Spectrochim. Acta B 47 (1992) 1173.
98. S.K. Ohordnik, W.W. Harrison, Plasma diagnostic measurements in the cryogenically cooled glow discharge, J. Analyt. Atom. Spectrom. 9 (1994) 991.
99. P.E. Walters, T.L. Chester, J.D. Winefordner, Measurement of excitation, ionization and electron temperatures and positive ion concentrations in a 144 MHz inductively coupled radio frequency plasma, Appl. Spectrosc. 31 (1977) 1.
100. N.P. Ferreira, H.G.C. Human, L.R.P. Butler, Kinetic temperatures and electron densities in the plasma of a side-view Grimm-type glow discharge, Spectrochim. Acta B 35 (1980) 287.
101. Z.M. Jelenak, Z.B. Velikic, J.V. Bozin, Z.L. Petrovic, B.M. Jelenkovic, Electronic excitation of the 750 and 811 nm lines of argon, Phys. Rev. E 47 (1993) 3566.
102. E.W. Eckstein, J.W. Coburn, E. Kay, Diagnostics of an RF sputtering glow discharge-correlation between atomic absorption and mass spectrometry, Int. J. Mass Spectrom. Ion Physics 17 (1975) 129.
103. K.R. Hess, W.W. Harrison, The role of metastable atoms in glow discharge ionization processes, Analyt. Chem. 60 (1988) 691.
104. M. Tuszewski, A compact mass spectrometer for plasma discharge ion analysis, Rev. Sci. Instrum. 67 (1996) 2215.
105. R.-C. Deng, P. Williams, Suppresion of cluster ion interferences in glow discharge mass spectrometry by sampling high-energy ions from a reversed hollow cathode ion source, Analyt. Chem. 66 (1994) 1890.
106. B.E. Thompson, K.D. Allen, A.D. Richards, H.H. Sawin, Ion bombardment energy distributions in radio-frequency glow discharge systems, J. Appl. Phys. 59 (1986) 1890.
107. W.M. Greene, M.A. Hartney, W.G. Oldham, D.W. Hess, Ion transit through capacitively coupled Ar sheaths: ion current and energy distribution, J. Appl. Phys. 63 (1988) 1367.
108. S. Kumar, P.K. Ghosh, Ion kinetic energy distribution in nitrogen DC discharge, Int. J. Mass Spectrom. Ion Process. 127 (1993) 105.
109. J.K. Olthoff, R.J. Van Brunt, S.B. Radovanov, Ion kinetic energy distributions in argon RF glow discharges, J. Appl. Phys. 72 (1992) 4566.
110. J.K. Olthoff, R.J. Van Brunt, S.B. Radovanov, J.A. Rees, R. Surowiec, Kinetic energy distributions of ions sampled from argon plasmas in a parallel-plate, radio frequency reference cell, J. Appl. Phys. 75 (1994) 115.
111. K.-U. Riemann, U. Ehlemann, K. Wiesemann, The ion energy distribution in front of a negative wall, J. Phys. D 25 (1992) 620.
112. U. Kortshagen, M. Zethoff, Ion energy distribution functions in a planar inductively coupled RF discharge, Plasma Sources Sci. Technol. 4 (1995) 541.
113. P. Gill, C.E. Webb, Electron energy distributions in the negative glow and their relevance to hollow cathode lasers, J. Phys. D 10 (1977) 299.
114. N.P. Ferreira, J.A. Strauss, H.G.C. Human, Distribution of metastable argon atoms in the modified Grimm-type electrical discharge, Spectrochim. Acta B 37 (1982) 273.
115. N.P. Ferreira, H.G.C. Human, A study of the density of sputtered atoms in the plasma of the modified Grimm-type glow discharge source, Spectrochim. Acta B 36 (1981) 215.
116. N.I. Uzelac, F. Leis, Measurement of gas temperatures and metastable state densities in a microwave boosted glow discharge using a diode laser, Spectrochim. Acta B 47 (1992) 877.
117. A.J. Langley, R.A. Beaman, A.N. Davies, W.J. Jones, J. Baran, Concentration-modulated absorption spectroscopy. I., Chem. Phys. 101 (1986) 117.
118. R.M. Allott, M. Kubinyl, A. Grofcsik, W.J. Jones, R.S. Mason, Temporal and spatial distribution profiles of lithium atoms in low-pressure discharges by concentration-modulated absorption spectroscopy, J. Chem. Soc. Faraday Trans. 91 (1995) 1297.
119. G.M. Hieftje, Plasma diagnostic techniques for understanding and control, Spectrochim. Acta B 47 (1992) 3.
120. N.N. Sesi, D.S. Hanselman, P. Galley, J. Homer, M. Huang, G.M. Hieftje, An imaging based instrument for fundamental plasma studies, Spectrochim. Acta B 52 (1997) 83.
121. D.M. Manos, J.L. Cecchi, C.W. Cheah, H.F. Dylla, Diagnostics of low temperature, plasmas: the electron component, Thin Solid Films 195 (1991) 319.
122. M. Fadlallah, J.-P. Booth, J. Derouard, N. Sadeghi, Sheath electric field oscillation and ion kinetics in radio frequency discharges, J. Appl. Phys. 79 (1996) 8976.
123. I.R. Videnovic, N. Konjevic, M.M. Kuraica, Spectroscopic investigations of a cathode fall region of the Grimm-type glow discharge, Spectrochim. Acta B 51 (1996) 1707.
124. J.P. Booth, J. Derouard, M. Fadlallah, L. Cabaret, J. Pinard, Electric field measurements in discharges by Doppler-free two-photon laser Stark spectroscopy of atomic hydrogen, Opt. Commun. 132 (1996) 363.
125. M.M. Kuraica, N. Konjevic, I.R. Videnovic, Spectroscopic study of the cathode fall region of Grimm-type glow discharge in helium, Spectrochim. Acta B 52 (1997) 745.
126. W. Grimm, Eine neue Glimmentladungslampe für die optische Emissionsspektralanalyse, Spectrochim. Acta B 23 (1968) 443.
127. J.W. Coburn, E. Kay, A new technique for the elemental analysis of thin surface layers of solids, Appl. Phys. Lett. 19 (1971) 350.
128. D.L. Donohue, W.W. Harrison, Radiofrequency cavity ion source in solids mass spectrometry, Analyt. Chem. 47 (1975) 1528.
129. D.C. Duckworth, R.K. Marcus, Radiofrequency powered glow discharge atomization/ionization source for solids mass spectrometry, Analyt. Chem. 61 (1989) 1879.
130. M.R. Winchester, R.K. Marcus, Applicability of a radiofrequency powered glow discharge for the direct solids analysis of non-conducting materials by atomic emission spectrometry, J. Analyt. Atom. Spectrom. 5 (1990) 575.
131. R.K. Marcus, P.R. Cable, D.C. Duckworth, M.V. Buchanan, J.M. Pochkowski, R.R. Weller, A simple, lensless interface of an RF glow discharge device to an FT-ICR (FTMS), Appl. Spectrosc. 46 (1992) 1327.
132. S.A. McLuckey, G.L. Glish, D.C. Duckworth, R.K. Marcus, Radio frequency glow discharge ion trap mass spectrometry, Analyt. Chem. 64 (1992) 1606.
133. C.R. Shick Jr., A. Raith, R.K. Marcus, Complementary radiofrequency glow discharge source for a commercial quadrupole mass spectrometer system, J. Analyt. Atom. Spectrom. 8 (1993) 1043.
134. D.C. Duckworth, D.L. Donohue, D.J. Smith, T.A. Lewis, R.K. Marcus, Design and characterization of a radiofrequency powered glow discharge source for double focusing mass spectrometers, Analyt. Chem. 65 (1993) 2478.
135. T.R. Harville, R.K. Marcus, Line selection and evaluation of radiofrequency glow discharge atomic emission spectrometry for the analysis of copper and aluminum alloys, Analyt. Chem. 65 (1993) 3636.
136. D.P. Myers, M.J. Heintz, P.P. Mahoney, G. Li, G.M. Hieftje, Characterization of a radiofrequency glow discharge/time-of-flight mass spectrometer, Appl. Spectrosc. 48 (1994) 1337.
137. N. Bordel-Garcia, R. Pereiro-Garcia, M. Fernandez-Garcia, A. Sanz-Medel, T.R. Harville, R.K. Marcus, Preliminary study of the role of discharge conditions on the in-depth analysis of conducting thin films by radio frequency glow discharge optical emission spectrometry, J. Analyt. Atom. Spectrom. 10 (1995) 671.
138. A.I. Saprykin, J.S. Becker, H.-J. Dietze, Characterization and optimization of a radio frequency glow discharge ion source for a high resolution mass spectrometer, J. Analyt. Atom. Spectrom. 10 (1995) 897.
139. S. De Gendt, R. Van Grieken, S.K. Ohorodnik, W.W. Harrison, Parameter evaluation for the analysis of oxide-based samples with radio frequency glow discharge mass spectrometry, Analyt. Chem. 67 (1995) 1026.
140. M.J. Heintz, G.M. Hieftje, Effect of driving frequency on the operation of a radiofrequency glow discharge emission source, Spectrochim. Acta B 50 (1995) 1125.
141. C.R. Shick Jr, , R.K. Marcus, Optimization of discharge parameters for a flat-type radiofrequency glow discharge source coupled to a quadrupole mass spectrometer system, Appl. Spectrosc. 50 (1996) 454.
142. V. Hoffmann, H.-J. Uhlemann, F. Präßter, K. Wetzig, D. Birus, New hardware for radiofrequency powered glow discharge spectroscopies and its capabilities for analytical applications, Fresenius' J. Analyt. Chem. 355 (1996) 826.
143. J.A. Klingler, C.M. Barshick, W.W. Harrison, Factors influencing ion signal profiles in pulsed glow discharge mass spectrometry, Analyt. Chem. 63 (1991) 2571.
144. J.A. Klingler, W.W. Harrison, Glow discharge mass spectrometry using pulsed dual cathodes, Analyt. Chem. 63 (1991) 2982.
145. M.R. Winchester, R.K. Marcus, Emission characteristics of a pulsed, radiofrequency glow discharge atomic emission device, Analyt. Chem. 64 (1992) 2067.
146. M. Glick, B.W. Smith, J.D. Winefordner, Laser excited atomic fluorescence in a pulsed hollow cathode glow discharge, Analyt. Chem. 62 (1990) 157.
147. W. Hang, W.O. Walden, W.W. Harrison, Microsecond pulsed glow discharge as an analytical spectroscopic source, Analyt. Chem. 68 (1996) 1148.
148. W. Hang, C. Baker, B.W. Smith, J.D. Winefordner, W.W. Harrison, Microsecond-pulsed glow discharge time-of-flight mass spectrometry: analytical advantages, J. Analyt. Atom. Spectrom. 12 (1997) 143.
149. F.W. Aston, Mass Spectra and Isotopes, 2nd ed., Longmans, Green and Co, New York, 1942.
150. K.T. Bainbridge, E.B. Jordon, Mass spectrum analysis. 1. The mass spectrograph, 2. The existence of isobars of adjacent elements, Phys. Rev. 50 (1936) 282.
151. W.W. Harrison, C.W. Magee, Hollow cathode ion source for solids mass spectrometry, Analyt. Chem. 46 (1974) 461.
152. C.G. Bruhn, B.L. Bentz, W.W. Harrison, Simplified solids mass spectrometry combining a glow discharge source with a quadrupole mass filter, Analyt. Chem. 50 (1978) 373.
153. R.K. Marcus, W.W. Harrison, The hollow cathode plume: A plasma emission source for solids, Spectrochim. Acta B 40 (1985) 933.
154. J.E. Cantle, E.F. Hall, C.J. Shaw, P.J. Turner, A plasma discharge source mass spectrometer for inorganic analysis, Int. J. Mass Spectrom. Ion Process. 46 (1983) 11.
155. N. Jakubowski, D. Stüwer, G. Tölg, Improvement of ion source performance in glow discharge mass spectrometry, Int. J. Mass Spectrom. Ion Process. 71 (1986) 183.
156. R.C. Hutton, A. Raith, Analysis of pure metals using a quadrupole-based glow discharge mass spectrometer. Part 1. Analysis of copper, J. Analyt. Atom. Spectrom. 7 (1992) 623.
157. S.A. McLuckey, D.E. Goeringer, K.G. Asano, G. Vaidyanathan, J.L. Stephenson Jr., High explosives vapor detection by glow discharge-ion trap mass spectrometry, Rapid. Commun. Mass Spectrom. 10 (1996) 287.
158. F.L. King, W. W, Harrison, Collision-induced dissociation of polyatomic ions in glow discharge mass spectrometry, Int. J. Mass. Spectrom. Ion Process. 89 (1989) 171.
159. C.H. Watson, C.M. Barshick, J. Wronka, F.H. Laukien, J.R. Eyler, Pulsed-gas glow discharge for ultrahigh mass resolution measurements with fourier transform ion cyclotron resonance mass spectrometry, Analyt. Chem. 68 (1996) 573.
160. A.P. Mykytiuk, P. Semeniuk, S. Berman, Analysis of high purity metals and semiconductor materials by glow discharge mass spectrometry, Spectrochim. Acta Rev. 13 (1990) 1.
161. K. Robinson, E.F.H. Hall, Glow discharge mass spectrometry for nuclear materials, J. Metals 39 (1987) 14.
162. N.E. Sanderson, E. Hall, J. Clark, P. Charalambous, D. Hall, Glow discharge mass spectrometry - a powerful technique for the elemental analysis of solids, Mikrochim. Acta 1 (1987) 275.
163. N. Jakubowski, I. Feldmann, D. Stüwer, Comparison of ICPMS with spark ablation and GDMS for direct element analy-sis of conductive solids, Spectrochim. Acta B 50 (1995) 639.
164. L.R. Riciputi, D.C. Duckworth, C.M. Barshick, D.H. Smith, Isotope ratio measurements using glow discharge mass spectrometry, Int. J. Mass Spectrom. Ion Process. 146/147 (1995) 55.
165. K.L. Goodner, J.R. Eyler, C.M. Barshick, D.H. Smith, Elemental quantification based on argides, dimers and doubly charged glow discharge ions, Int. J. Mass Spectrom. Ion Process. 146/147 (1995) 65.
166. R.W. Smithwick III, D.W. Lynch, J.C. Franklin, Relative ion yields measured with a high resolution glow discharge mass spectrometer operated with an argon/hydrogen mixture, J. Am. Soc. Mass Spectrom. 4 (1993) 278.
167. G.I. Ramendik, D.A. Tyurin, Yu.I. Babikov, Is a universal model for ion formation during mass spectrometric elemental analysis possible?, Analyt. Chem. 62 (1990) 2501.
168. S.L. Tong, W.W. Harrison, Glow discharge mass spectrometric analysis of nonconducting materials, Spectrochim. Acta B 48 (1993) 1237.
169. S. De Gendt, W. Schelles, R. Van Grieken, V. Müller, Quantitative analysis of iron-rich and other oxide-based samples by means of glow discharge mass spectrometry, J. Analyt. Atom. Spectrom. 10 (1995) 681.
170. D.M.P. Milton, R.C. Hutton, Investigations into the suitability of using a secondary cathode to analyse glass using glow discharge mass spectrometry, Spectrochim. Acta B 48 (1993) 39.
171. W. Schelles, S. De Gendt, V. Müller, R. Van Grieken, Evaluation of secondary cathodes for glow discharge mass spectrometry analysis of different nonconducting sample types, Appl. Spectrosc. 49 (1995) 939.
172. W. Scheues, K. Maes, S. De Gendt, R. Van Grieken, Glow discharge mass spectrometric analysis of atmospheric particulate matter, Analyt. Chem. 68 (1996) 1136.
173. W. Schelles, R. Van Grieken, Direct current glow discharge mass spectrometric analysis of macor ceramics using a secondary cathode, Analyt. Chem. 68 (1996) 3570.
174. W. Schelles, S. De Gendt, R. Van Grieken, Optimization of secondary cathode thickness for direct current glow discharge mass spectrometric analysis of glass, J. Analyt. At. Spectrom. 11 (1996) 937.
175. M. Betti, S. Giannarelli, T. Hiernaut, G. Rasmussen, L. Koch, Detection of trace radioisotopes in soil, sediment and vegetation by glow discharge mass spectrometry, Fresenius' J. Analyt. Chem. 355 (1996) 642.
176. W. Schelles, R. Van Grieken, Direct current glow discharge mass spectrometry for elemental characterization of polymers, Analyt. Chem. 69 (1997) 2931.
177. N. Jakubowski, D. Stüwer, Application of glow discharge mass spectrometry with low mass resolution for in-depth analysis of technical surface layers, J. Analyt. Atom. Spectrom. 7 (1992) 951.
178. A. Raith, R.C. Hutton, J.C. Huneke, Optimization of quantitative depth profiling with glow discharge mass spectrometry. Part 1. Optimization studies on crater shape and time-depth conversion, J. Analyt. Atom. Spectrom. 8 (1993) 867.
179. N. Jakubowski, D. Stüwer, G. Tölg, Microchemical determination of platinum and iridium by glow discharge mass spectrometry, Spectrochim. Acta 46B (1991) 155.
180. G.G. Sikharudlidze, Glow discharge plasma sources for liquids, poster presented at the 1996 Winter Conference on Plasma Spectrochemistry, Fort Lauderdale, FL, 1996.
181. S.A. McLuckey, G.L. Glish, K.G. Asano, B.G. Grant, Atmospheric sampling glow discharge ionization source for the determination of trace organic compounds in ambient air, Analyt. Chem. 60 (1988) 2220.
182. D. Carazatto, M.J. Bertrand, Characterization of a glow discharge ion source for the mass spectrometric analysis of organic compounds, J. Am. Soc. Mass Spectrom. 5 (1994) 305.
183. R. Mason, D. Milton, Glow discharge mass spectrometry of some organic compounds, Int. J. Mass Spectrom. Ion Process. 91 (1989) 209.
184. R.K. Marcus, T.R. Harville, Y. Mei, C.R. Shick Jr., Rf-powered glow discharges: elemental analysis across the solids spectrum, Analyt. Chem. 66 (1994) 902A.
185. C.M. Barshick, D.H. Smith, J.H. Hackney, B.A. Cole, J.A. Cole, J.W. Wade, Glow discharge mass spectrometric analysis of trace metals in petroleum, Analyt. Chem. 66 (1994) 730.
186. C.M. Barshick, D.H. Smith, J.W. Wade, C.K. Bayne, Isotope dilution glow discharge mass spectrometry as applied to the analysis of lead in waste oil samples, J. Analyt. Atom. Spectrom. 9 (1994) 83.
187. M. Betti, G. Rasmussen, T. Hiernaut, L. Koch, D.M.P. Milton, R.C. Hutton, Adaptation of a glow discharge mass spectrometer in a glove-box for the analysis of nuclear materials, J. Analyt. Atom. Spectrom. 9 (1994) 385.
188. W.W. Harrison, Glow discharge mass spectrometry, in: F. Adams, R. Gijbels, R. Van Grieken (Eds), Inorganic Mass Spectrometry, Wiley, New York, 1988.
189. F.L. King, W.W. Harrison, Glow discharge mass spectrometry, in: R.K. Marcus (Ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
190. H. Schüler and A. Michel, Über zwei neue hohlkathoden-Entladungsröhren, Spectrochim, Acta 5 (1952) 322.
191. W.W. Harrison, N.J. Prakash, Trace element analysis of solutions by hollow cathode excitation, Analyt. Chim. Acta 49 (1970) 151.
192. J.A.C. Broekaert, Atomic emission spectrometry, in: R.K. Marcus (Ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
193. P.J. Treado, M.D. Morris, A thousand points of light: the Hadamard transform in chemical analysis and instrumentation, Analyt. Chem. 61 (1989) 723A.
194. J.A.C. Broekaert, K.R. Brushwyler, C.A. Monnig, G.M. Hieftje, Fourier transform atomic emission spectrometry with a Grimm-type glow discharge source, Spectrochim. Acta B 45 (1990) 769.
195. M. Dogan, Spektrochemische Bestimmung der Hauptbestandteile von Cu-Al-Binärlegierungen mit der Glimmentladungslampe als Lichtquelle, Spectrochim. Acta B 36 (1981) 103.
196. K. Wagatsuma, K. Hirokawa, Analysis of iron-base alloys by low wattage glow discharge emission spectrometry, Analyt. Chem. 56 (1984) 908.
197. I.M. Dharmadasa, M. Yves, J.S. Brooks, G.H. France, S.J. Brown, Application of glow discharge optical emission spectroscopy to study semiconductors and semiconductor devices, Semicond. Sci. Technol. 10 (1995) 369.
198. S. Caroli, O. Senofonte, M.G. Del Monte Tamba, M. Cilia, I.B. Brenner, M. Dvorochek, The analysis of non-conducting materials by low pressure discharges: sediments and dry residues, Spectrochim. Acta B 48 (1993) 877.
199. F. Flórian, W. Fischer, H. Nickel, Direct solid sample analysis of silicon carbide powders by direct current glow discharge and direct current arc emission spectrometry, J. Analyt. Atom. Spectrom. 9 (1994) 257.
200. C.M. Strange, R.K. Marcus, Aqueous sample introduction into a glow discharge device via a particle beam interface, Spectrochim. Acta B 46 (1991) 517.
201. R. Pereiro, T.K. Starn, G.M. Hieftje, Gas-sampling glow discharge for optical emission spectrometry. Part II: Optimization and evaluation for the determination of nonmetals in gas phase samples, Appl. Spectrosc. 49 (1995) 616.
202. R. Berneron, L'analyse des surfaces métalliques par spectrom étrie d' émission à décharge luminescente, Spectrochim. Acta 33B (1978) 665.
203. D.G. Jones, R. Payling, S.A. Gower, E.M. Boge, Analysís of pigmented polymer coatings with radiofrequency glow discharge optical emission spectrometry, J. Analyt. Atom. Spectrom. 9 (1994) 369.
204. A. Bengtson, Quantitative depth profile analysis by glow discharge, Spectrochim. Acta B 49 (1994) 411.
205. Z. Weiss, Quantitative depth profile analysis by glow discharge optical emission spectrometry: an alternative approach, J. Analyt. Atom. Spectom. 10 (1995) 891.
206. H. Hocquaux, Thin film analysis, in: R.K. Marcus (ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
207. J.A.C. Broekaert, Glow discharge atomic spectroscopy, Appl. Spectrosc. 49 (1995) 12A.
208. B.J. Russell, A. Walsh, Resonance radiation from a hollow cathode, Spectrochim. Acta 15 (1959) 883.
209. D.S. Gough, P. Hannaford, A. Walsh, The application of cathodic sputtering to the production of atomic vapours in atomic fluorescence spectroscopy, Spectrochim. Acta B 28 (1973) 197.
210. A.E. Bernhard, Atomic absorption spectrometry using sputtering atomization of solid samples, Spectroscopy 2 (1987) 24.
211. M. Parker, R.K. Marcus, Investigation of sample atomization using a power-modulated radiofrequency glow discharge source, Appl. Spectrosc. 50 (1996) 366.
212. B.W. Smith, J.B. Womack, N. Omenetto, J.D. Winefordner, Approaching single atom detection with atomic fluorescence in a glow discharge atom reservoir, Appl. Spectrosc. 43 (1989) 873.
213. W.O. Walden, W.W. Harrison, B.W. Smith, J.D. Winefordner, Multielement glow discharge atomic fluorescence using continuum sources, J. Analyt. Atom. Spectrom. 9 (1994) 1039.
214. B.M. Patel, J.D. Winefordner, Laser-excited fluorescence of diatomic molecules of copper and lead in glow discharge sputtering, Appl. Spectrosc. 40 (1986) 667.
215. M.R. Winchester, S.M. Hayes, R.K. Marcus, Determination of platinum and rhodium in γ-alumina catalysts by glow discharge atomization atomic absorption spectrophotometry, Spectrochim. Acta B 46 (1991) 615.
216. S.A. Dashin, I.A. Mayorov, M.A. Bolshov, Direct analysis of solid samples by laser excited atomic fluorescence spectrometry with sample atomization by ion sputtering in a planar magnetron discharge, Spectrochim. Acta B 48 (1993) 531.
217. C.L. Davis, B.W. Smith, M.A. Bolshov, J.D. Winefordner, Laser-excited atomic fluorescence of Eu, Y and Tm in a miniature glow discharge atom reservoir, Appl. Spectrosc. 49 (1995) 907.
218. E.H. Piepmeier, Atomic absorption and fluorescence spectroscopies, in: R.K. Marcus (ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
219. K.R. Hess, W.W. Harrison, in: D.M. Lubman (ed.), Lasers and Mass Spectrometry, Oxford University Press, London, 1990, p. 205.
220. Y. Iida, Laser vaporization of solid samples into a hollow cathode discharge for atomic emission spectrometry, Spectrochim. Acta B 45 (1990) 427.
221. Z. Zhu, E.H. Piepmeier, Optogalvanic and optopotential signals in a glow discharge reveal electrode coupling effects, Spectrochim. Acta B 49 (1994) 1775.
222. C.M. Barshick, R.W. Shaw, J.P. Young, J.M. Ramsey, Evaluation of the precision and accuracy of a uranium isotope analysis using glow discharge optogalvanic spectroscopy, Analyt. Chem. 67 (1995) 3814.
223. K.R. Hess, Laser based methods, in: R.K. Marcus (ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
224. H. Falk, Einige theoretische Ueberlegungen zum Vergleich der physikalischer Grenzen thermischer und nich-thermischer spektroskopischer Strahlungsquellen, Spectrochim. Acta B 32 (1977) 437.
225. P.G. Riby, J.M. Harnley, D.L. Styris, N.E. Ballou, Emission characteristics of chromium in hollow anode furnace atomization non-thermal excitation spectrometry, Spectrochim. Acta B 46 (1991) 203.
226. D.C. Liang, M.W. Blades, An atmospheric pressure capacitively coupled plasma formed inside a graphite furnace as a source for atomic emission spectroscopy, Spectrochim. Acta B 44 (1989) 1059.
227. R.E. Sturgeon, S.N. Willie, V.T. Luong, S.S. Berman, Characteristic temperatures in a FAPES source, Spectrochim. Acta B 46 (1991) 1021.
228. J.M. Harnly, D.L. Styris, P.G. Rigby, Discharges with graphite furnace atomizers, in: R.K. Marcus (ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
229. G.S. Lomdahl, J.V. Sullivan, Use of a boosted-output lamp for analysis of powdered rocks and metals, Spectrochim. Acta B 39 (1984) 1395.
230. N.P. Ferreira, J.A. Straus, H.G.C. Human, Developments in glow discharge emission spectrometry, Spectrochim. Acta B 38 (1983) 899.
231. F. Leis, E.B.M. Steers, Boosted glow discharges for atomic spectroscopy - analytical and fundamental properties, Spectrochim. Acta B 49 (1994) 289.
232. Z. Shi, S. Brewer, R. Sacks, Application of a magnetron glow discharge to direct solid sampling for mass spectrometry, Appl. Spectrosc. 49 (1995) 1232.
233. C. Molle, M. Wautelet, J.P. Dauchot, M. Hecq, Characterization of a magnetron radiofrequency glow discharge with a glass cathode using experimental design and mass spectrometry, J. Analyt. Atom. Spectrom. 10 (1995) 1039.
234. M.J. Heintz, G.M. Hieftje, Design and characterization of a planar magnetron radiofrequency glow discharge source for atomic emission spectrometry, Spectrochim. Acta B 50 (1995) 1109.
235. A.R. Raghani, B.W. Smith, J.D. Winefordner, A miniature planar magnetron glow discharge source for analysis of submicroliter volume aqueous samples using atomic emission spectroscopy, Spectrochim. Acta B 51 (1996) 399.
236. M.J. Heintz, J.A.C. Broekaert, G.M. Hieftje, Analytical characterization of a planar magnetron radiofrequency glow discharge source, Spectrochim. Acta B 52 (1997) 579.
237. P.R. Banks, M.W. Blades, Atomic emission spectroscopy using a jet-assisted glow discharge source, Spectrochim. Acta B 44 (1989) 1117.
238. J.A.C. Broekaert, T. Bricker, K.R. Brushwyler, G.M. Hieftje, Investigations of a jet-assisted glow discharge lamp for optical emission spectrometry, Spectrochim. Acta B 47 (1992) 131.
239. H.J. Kim, Y.S. Park, J.H. Cho, G.H. Lee, K.H. Cho, K.B. Lee, H.S. Kim, Studies of jet configurations for jet-enhanced sputtering devices, J. Analyt. Atom. Spectrom. 10 (1995) 335.
240. M.R. Winchester, M.L. Salit, Design and initial characterization of a glow discharge atomic emission instrument for macro-scale elemental composition mapping of solid surfaces, Spectrochim. Acta B 50 (1995) 1045.
241. Y. Kanzaki, N. Nishimura, O. Matsumoto, On the yields of glow discharge electrolysis in various atmospheres, J. Electroanalyt. Chem. Interfacial Electrochem. 167 (1984) 297.
242. T. Cserfalvi, P. Mezei, P. Apai, Emission studies on a glow discharge in atmospheric pressure air using water as a cathode, J. Phys. D 26 (1993) 2184.