Dynamic voltage-current characteristics of unipolar pulse glow discharge

Materials Science Forum

Volumn 494, Issue , 2005, Pages 315-320

  Popovic I ^a   Rajovic V ^a   Zlatanovic M ^a  

^a Faculty of Electrical Engineering   (Serbia)

Author keywords

Dynamic parameters; Electrical characteristics; Pulse plasma biasing; System modeling

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; PLASMA WAVES; PROCESS CONTROL; SURFACE TREATMENT; WAVEFORM ANALYSIS;

DYNAMIC PARAMETERS; ELECTRICAL CHARACTERISTICS; PULSE PLASMA BIASING; SYSTEM MODELING;

GLOW DISCHARGES;

EID: 28844499682     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-971-7.315     Document Type: Conference Paper

References (8)

1. A. Anders, Surface & Coatings Technology, 183 (2004), p. 301.
2. T. A. Beer, J. Laimer, H. Störi, Surface & Coatings Technology, 116-119 (1999), p. 1016.
3. M. Zlatanović, I. Popović, Proc. ETRAN Conf., (2003), p. 307.
4. I. Popović, M. Zlatanović, Proc. ITC Conf., (2003), p. 136.
5. J. Laimer, M. Fink, T. A. Beer, H. Störi, Surface & Coatings Technology, 174-175 (2003), p. 118.
6. M. Zlatanović, Proc. 7th Yug. Tribol. Conf. YUTRIB'01, (2001), p. 7.
7. M. Zlatanović. I. Popović, A. Zlatanović, Proc. 21st SPIG Conf., (2003), p. 254.
8. I. Popović, M. Zlatanović, V. Rajović, Proc. 22nd SPIG Conf., (2004), p. 457.