Characterization of radio frequency sputtered SixGe 1-xOy thin films for uncooled micro-bolometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6940, Issue , 2008, Pages

  Cheng, Q ^a   Almasri, M ^a  

^a University of Missouri   (United States)

Author keywords

Amorphous silicon germanium oxide; Infrared detector; Thermal detector; Uncooled microbolometer

Indexed keywords

INFRARED TECHNOLOGIES; RADIO FREQUENCY (RF);

COMPUTER NETWORKS; SILICON; TECHNOLOGY; THICK FILMS; THIN FILMS;

INFRARED RADIATION;

EID: 45549106656     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.777909     Document Type: Conference Paper

References (13)

1. P. W. Norton and M. Kohin, "Technology and Application Advancements of Uncooled Imagers," Proc. SPIE, vol. 5783, pp. 524-530, 2005.
2. x Microbolometer FPAs," Proc. SPIE, vol. 5783, pp. 448, 2005.
3. T. Schimert, D. Ratcliff, J. Brady, S. Ropson, R. Gooch, B. Ritchey, P. McCardel, K. Rachels, M. Wand, M. Weinstein, and J. Wynn, "Low Cost, Low Power Uncooled a: Si Based Micro Infrared Camera for Unattended Ground Sensor Applications," Proc. SPIE, vol. 3713, pp. 101-111, 1999.
4. M. S. Liu, J. S. Haviland, and C. J. Yue, "Integrated Infrared Sensitive Bolometers," Patent No. US005260225A, 1992.
5. J. S. Shie, Y. M Chen, M. O. Yang, and B. C. S. Chou, "Characterization and Modeling of Metal-Film Microbolometer," IEEE/ JMEMS, vol 5, no. 4, pp. 298-306, 1996.
6. M. Almasri, Z. Çelik-Butler, D. P. Butler, A. Yaradanakul, and A. Yildiz, "Uncooled Multimirrors Broad-band Infrared Microbolometers," IEEE/ JMEMS, vol. 11, no. 5, pp. 528- 535, 2002.
7. P. De Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. Van Hoof, "Thermal Infrared Detection Using Linear Arrays of Poly SiGe Uncooled Microbolometers," ICM 2003, pp. 140-142, 2003.
8. y Bolometer for Thermal Imaging Applications," Proc. SPIE, vol. 5578, pp. 298-308, 2004.
9. E. Iborra, M. Clement, L. V. Herrero, J. Sangrador, "IR Uncooled Bolometers Based on Amorphous Ge/sub x/Si/sub 1-x/O/sub y/ on Silicon Micromachined Structures," IEEE/ JMEMS, vol. 11, pp. 322- 329, 2002.
10. y Thin Films for Uncooled Infrared Detectors," Thin Solid Films, vol. 514, pp. 355-360, 2006.
11. M. Garcia, R. Ambrosio, A. Torres and A. Kosarev, "IR Bolometers Based on Amorphous Silicon Germanium Alloys," Journal of Non-Crystalline Solids, vol. 338-340, pp. 744-748, 2004.
12. 0.2: phase formation and thermal stability," Microelectronic Engineering, vol. 76, no. 1-4, pp. 297-302, 2004.
13. P. W. Kruse, and D. D. Skatrud, "Uncooled Infrared Imaging Arrays and Systems," Semiconductors and Semimetals, vol. 47, pp 17-42, Academic Press, New York, 1997.