Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers

Proceedings of the International Conference on Microelectronics, ICM

Volumn 2003-January, Issue , 2003, Pages 140-142

  De Moor, P ^a   Creten, Y ^a   Goessens, C ^a   Grietens, B ^b   Leonov, V ^a   Vermeiren, J ^b   Van Hoof, C ^a  

^a IMEC   (Belgium)

^b XenICs   (Belgium)

Author keywords

Bolometers; Etching; Filling; Germanium silicon alloys; Infrared detectors; Manufacturing processes; Production; Silicon germanium; Thermal conductivity; Thermal resistance

Indexed keywords

BICMOS TECHNOLOGY; BOLOMETERS; ETCHING; FILLING; GERMANIUM; GERMANIUM ALLOYS; HEAT RESISTANCE; INFRARED DETECTORS; INFRARED SPECTROSCOPY; MICROELECTRONICS; PROCESS MONITORING; PRODUCTION; SILICON DETECTORS; TEMPERATURE MEASUREMENT; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY;

GERMANIUM SILICON ALLOY; INFRARED ARRAYS; MANUFACTURING PROCESS; SIGE TECHNOLOGY; SILICON GERMANIUM; TECHNOLOGICAL PROCESS; THERMAL INFRARED; UNCOOLED MICROBOLOMETERS;

SILICON ALLOYS;

EID: 45549105890     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICM.2003.238498     Document Type: Conference Paper

References (3)

1. S. Sedky, P. Fiorini, M. Caymax, A. Verbist, and C. Baert, "Infrared bolometers made of polycrystalline silicon germanium", Sensors and Actuators A 66, pp. 193-199, 1998.
2. P. De Moor, J. John, S. Sedky, and C. Van Hoof, "Linear arrays of fast uncooled poly Si-Ge microbolometers for IR detection", Infrared Detectors and Focal Plane Arrays VI. SPIE 4028, pp. 27-34, 2000.
3. V. N. Leonov, N. A. Perova, P. De Moor, B. Du Bois, C. Goessens, B. Grietens, A. Verbist, C. Van Hoof, and J. Vermeiren, "Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy," Proc. SPIE 4945, pp. 54-63, 2003.