Modeling of coupled dome-shaped microoscillators

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 777-786

  Sahai, Tuhin ^a,b   Zehnder, Alan T ^a  

^a Cornell University ^*  (United States)

^b UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

Author keywords

Buckling; Coupled oscillators; Galerkin projections; Resonators; Thermomechanical modeling

Indexed keywords

BESSEL FUNCTIONS; BIFURCATION (MATHEMATICS); BOUNDARY CONDITIONS; BOUNDARY VALUE PROBLEMS; COMPUTER NETWORKS; DIFFERENTIAL EQUATIONS; DIFFERENTIATION (CALCULUS); DOMES; DYNAMICAL SYSTEMS; MATHEMATICAL MODELS; MODAL ANALYSIS; NUMERICAL METHODS; ORDINARY DIFFERENTIAL EQUATIONS; OSCILLATORS (ELECTRONIC); OSCILLATORS (MECHANICAL); POLYSILICON; SIGNAL PROCESSING;

(I ,J) CONDITIONS; BIFURCATION ANALYSIS; GALERKIN PROJECTIONS; HEAT EQUATIONS; LIMIT CYCLING; MICRO MECHANICAL OSCILLATORS; MODE SHAPES; MODELING APPROACHES; NEURAL COMPUTING; NONLINEAR LIMIT; PLATE EQUATIONS; SINGLE OSCILLATOR MODEL;

DIFFERENCE EQUATIONS;

EID: 45449109620     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.924844     Document Type: Article

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