|
Volumn 78, Issue 12, 2001, Pages 1682-1684
|
Electrical characterization of TiN/a-C/Si devices grown by magnetron sputtering at room temperature
|
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 0035911335
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1352658 Document Type: Article |
Times cited : (9)
|
References (18)
|