Integration of single carbon nanofibers in standard via interconnects

Applied Physics Letters

Volumn 92, Issue 22, 2008, Pages

  Coiffic, J C ^a   Mariolle, D ^a   Chevalier, N ^a   Olivier, S ^a   Lafond, D ^a   Fayolle, M ^a   Maitrejean, S ^a   Le Poche, H ^b  

^a CEA LETI   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON NANOTUBES; COBALT COMPOUNDS; CUBIC BORON NITRIDE; ELECTRIC PROPERTIES; FULLERENES; HEALTH; INTELLIGENT MATERIALS; MULTIWALLED CARBON NANOTUBES (MWCN); NANOFIBERS; NANOSTRUCTURED MATERIALS; SCANNING; STANDARDS;

AMERICAN INSTITUTE OF PHYSICS (AIP); CARBON NANOFIBER (CNF); ELECTRICAL (ELECTRONIC) PROPERTIES; INTEGRATION PROCESSES; MULTI-WALL NANOTUBES (MWNT); NANO FIBERS; SCANNING SPREADING RESISTANCE MICROSCOPY (SSRM); SELF ALIGNED (SA); SINGLE CARBON NANOFIBERS (CNF);

CARBON NANOFIBERS;

EID: 44849084679     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2942377     Document Type: Article

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