Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 147-153

  Cadarso, V J ^a   Llobera, A ^a,b   Villanueva, G ^a   Seidemann, V ^b   Buttgenbach S ^b   Plaza, J A ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Electrothermal actuators; Microoptomechanical systems (MOEMS); Optical accelerometers; Polymer technology; SU 8; Variable optical attenuators (VOA)

Indexed keywords

ACCELERATION; ACCELEROMETERS; ARCHITECTURAL DESIGN; CHEMICALS; COMPUTER NETWORKS; ELECTRIC ATTENUATORS; ELECTRIC POWER UTILIZATION; ELECTROMAGNETIC WAVE ATTENUATION; ELECTROMAGNETIC WAVES; FIBER OPTICS; INTEGRATED OPTICS; OPTICAL DESIGN; OPTICAL SYSTEMS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; TECHNOLOGY; THERMAL EXPANSION; THERMAL SPRAYING; VARIATIONAL TECHNIQUES;

APPLIED (CO); ELSEVIER (CO); EXPERIMENTAL RESULTS; FIBER OPTIC; HIGH THERMAL; LOW-POWER CONSUMPTION; MICRO OPTO ELECTRO MECHANICAL SYSTEMS (MOEMS); OPTICAL (PET) (OPET); OPTICAL ACCELEROMETER; POLYMER STRUCTURES; POWER CONSUMPTION (CE); SELF ALIGNMENT (SA); SIMPLE TECHNOLOGY; VARIABLE OPTICAL ATTENUATOR (VOA); VARIABLE OPTICAL ATTENUATORS (VOAS); WORKING PRINCIPLES;

WAVEGUIDE ATTENUATORS;

EID: 44849084493     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.11.007     Document Type: Article

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