Characterization and Passivation Effects of an Optical Accelerometer Based on Antiresonant Waveguides

IEEE Photonics Technology Letters

Volumn 16, Issue 1, 2004, Pages 233-235

  Llobera, A ^a,b   Plaza, J A ^a   Salinas, I ^c   Berganzo, J ^d   Garcia J ^d   Esteve, J ^a   Dominguez C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^c UNIVERSITY OF ZARAGOZA   (Spain)

^d IK4 IKERLAN   (Spain)

Author keywords

Acceleration measurement and silicon on insulator technology; Antiresonant reflecting optical waveguides (ARROW)

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; ELECTRIC INSULATORS; ETCHING; FINITE ELEMENT METHOD; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; OPTICAL FIBERS; SENSITIVITY ANALYSIS; SILICON NITRIDE; SILICON WAFERS; USER INTERFACES;

ANTIRESONANT REFLECTING OPTICAL WAVEGUIDES (ARROW); OPTICAL SENSITIVITY;

WAVEGUIDES;

EID: 0346707333     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2003.818919     Document Type: Article

References (8)

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