Characterization and gas-sensing behavior of an iron oxide thin film prepared by atomic layer deposition

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6110-6115

  Aronniemi, Mikko ^a   Saino, J ^a   Lahtinen, J ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Atomic force microscopy; Atomic layer deposition; Gas sensor; Iron oxide; Thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; CARBON MONOXIDE; CHEMICAL SENSORS; IRON OXIDES; VOLTAGE CONTROL;

GRANULAR STRUCTURES; OHMIC CURRENT-VOLTAGE DEPENDENCY;

THIN FILMS;

EID: 44649091228     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.011     Document Type: Article

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