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Volumn 34, Issue 1-3, 1996, Pages 412-416

Characterization of α-Fe2O3 thin films deposited by atmospheric pressure CVD onto alumina substrates

Author keywords

Atmospheric pressure CVD; Gas sensing properties; Fe2O3 thin films

Indexed keywords


EID: 0042045154     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80014-7     Document Type: Article
Times cited : (30)

References (8)
  • 1
    • 0027541693 scopus 로고
    • 2 films deposited by d.c. gas discharge activating reaction evaporation onto amorphous and crystalline substrates
    • 2 films deposited by d.c. gas discharge activating reaction evaporation onto amorphous and crystalline substrates, Thin Solid Films, 224 (1993) 82.
    • (1993) Thin Solid Films , vol.224 , pp. 82
    • Zhu, Y.1    Lu, H.2    Lu, Y.3    Pen, X.4
  • 5
    • 0028448339 scopus 로고
    • 3 thin films prepared by plasma-enhanced chemical vapour deposition
    • 3 thin films prepared by plasma-enhanced chemical vapour deposition, Thin Solid Films, 245 (1994) 225.
    • (1994) Thin Solid Films , vol.245 , pp. 225
    • Yan, B.1    Peng, J.2    Chai, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.