Modeling of interfacial sliding and film crawling in back-end structures of microelectronic devices

Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference

Volumn 2, Issue , 2004, Pages 137-144

  Dutta, I ^a   Park, C ^a   Peterson, K A ^a   Vella, J ^b   Pan, D ^a  

^a Naval Postgraduate School   (United States)

^b MOTOROLA INC   (United States)

Author keywords

Back end structure; Cu interconnects; Interfacial sliding; Low K dielectric; Plasticity; Thermo mechanical cycling

Indexed keywords

BACK-END STRUCTURE; CU INTERCONNECTS; INTERFACIAL SLIDING; LOW-K DIELECTRIC; THERMO-MECHANICAL CYCLING;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; COPPER COMPOUNDS; DEFORMATION; DIELECTRIC DEVICES; DIFFUSION; FLIP CHIP DEVICES; INTERFACES (MATERIALS); RELIABILITY; SENSITIVITY ANALYSIS; THIN FILMS;

MICROELECTRONICS;

EID: 4444344329     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. M.D. Thouless, J. Gupta, and J.M.E. Harper, J. Mater. Res., 8, 1845 (1993).
2. M.W.Chen and I. Dutta, Appl. Phys. Let.,77, 4298 (2000).
3. I. Dutta, M.W. Chen, K. Peterson and T. Shultz, J. Electron. Mater., 30, 1537 (2001).
4. I. Dutta, K. Peterson and M.W. Chen, Proc. Plasticity '02, NEAT Press, 117 (2002).
5. M. Huang, Z. Suo and Q. Ma, Acta Mater., 49, 3039 (2001).
6. D.V. Zhmurkin, T.S. Gross, and L.P. Buchwalter, J. Electron. Mater.,26, 791 (1997).
7. M. Gosz and A.F. Okyar, Mech. Mater., 31, 317 (1999).
8. C. Park, I. Dutta, K. A. Peterson and J. Vella, J. Electronic Mater., 32, 1059 (2003).
9. L.M. Gignac, K.P. Rodbell, C. Cabrai, P.C. Andricacos, P.M. Rice, R.B. Beyers, P.S. Locke, S.J. Klepeis, Mater. Res. Soc. Symp., 564, 373 (1999).
10. C. Park, T.E. Shultz and I. Dutta, "An Environmentally Protected Hot-Stage AFM for Studying Thermo-Mechanical Deformation in Microelectronic Devices", Rev. Sci. Instrum., in press.
11. P.A. Flinn, J. Mater. Res., 6, 1498 (1991).
12. J.V. Funn and I. Dutta, Acta Mater., 47, 149 (1999).
13. I. Dutta, Acta Mater., 48, 1055 (2000).
14. K. A. Peterson, I. Dutta and M.W. Chen, Scripta Mater., 47, 649 (2002).
15. K.A. Peterson, I. Dutta and M.W. Chen, Acta Mater., 51, 2831 (2003).
16. P.S.Ho, K.D.Lee, E.T.Ogawa, X.Lu, H-Matsuhashi, V.A.Blaschke, R.Augur, Proc. IEDM02,741 (2002).
17. H. J. Frost and M. F. Ashby, "Deformation Mechanism Maps", Pergamon Press, Oxford (1982).
18. K.A. Peterson, C. Park and I. Dutta, MRS Symp. Proc., 716, 483 (2002).