5-Phenyl-1-H-tetrazole as a low-ph passivating agent for copper chemical mechanical planarization

Journal of the Electrochemical Society

Volumn 155, Issue 7, 2008, Pages

  Govindaswamy, Suresh ^a   Tripathi, Abhinav ^a,c   Suni, Ian Ivar ^a,c   Li, Yuzhuo ^b  

^a Clarkson University   (United States)

^b CLARKSON UNIVERSITY   (United States)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC COMPOUNDS; CHEMICAL MECHANICAL POLISHING; COPPER; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PASSIVATION; PERMITTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE;

5-PHENYL-1-H-TETRAZOLE; PASSIVATING AGENTS;

DIELECTRIC MATERIALS;

EID: 44349190014     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2907377     Document Type: Article

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