Role of the functional groups of complexing agents in copper slurries

Journal of the Electrochemical Society

Volumn 153, Issue 7, 2006, Pages

  Patri, Udaya B ^a,b,e   Aksu, Serdar ^c   Babu, S V ^a,b,d  

^a Wallace H Coulter School of Engineering   (United States)

^b CLARKSON UNIVERSITY   (United States)

^c ASM NuTool Inc   (United States)

^d ELECTROCHEMICAL SOCIETY

^e INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDIC CONDITIONS; COMPLEXING AGENTS; FUNCTIONAL GROUPS; GLYCINE-BASED SLURRIES;

AMINES; COMPLEXATION; DISSOLUTION; ELECTROCHEMISTRY; PH EFFECTS; SLURRIES;

COPPER;

EID: 33744827136     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2199307     Document Type: Article

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