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Volumn 153, Issue 7, 2006, Pages

Role of the functional groups of complexing agents in copper slurries

Author keywords

[No Author keywords available]

Indexed keywords

ACIDIC CONDITIONS; COMPLEXING AGENTS; FUNCTIONAL GROUPS; GLYCINE-BASED SLURRIES;

EID: 33744827136     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2199307     Document Type: Article
Times cited : (51)

References (39)
  • 1
    • 34249882209 scopus 로고    scopus 로고
    • MRS Spring Meeting Proceedings, Vol. S. V.Babu, R.Singh, N.Hayasaka, and M.Oliver, Editors (Warrendals, PA
    • Chemical-Mechanical Planarization, MRS Spring Meeting Proceedings, Vol. 732E, S. V. Babu, R. Singh, N. Hayasaka, and, M. Oliver, Editors (Warrendals, PA, 2002).
    • (2002) Chemical-Mechanical Planarization , vol.732
  • 2
    • 33744807949 scopus 로고    scopus 로고
    • MRS Spring Meeting Proceedings, Vol. S. V.Babu, K. C.Cadien, and H.Yano, Editors (Warrendals, PA
    • Chemical-Mechanical Polishing: Advances and Future Challenges, MRS Spring Meeting Proceedings, Vol. 671, S. V. Babu, K. C. Cadien, and, H. Yano, Editors (Warrendals, PA, 2002).
    • (2002) Chemical-Mechanical Polishing: Advances and Future Challenges , vol.671
  • 20
    • 33744779578 scopus 로고    scopus 로고
    • Ph.D. Thesis, Clarkson University, Potsdam, NY
    • U. B. Patri, Ph.D. Thesis, Clarkson University, Potsdam, NY (2005).
    • (2005)
    • Patri, U.B.1
  • 21
    • 33744797044 scopus 로고    scopus 로고
    • Ph.D. Thesis, Clarkson University, Potsdam, NY
    • V. Gorantla, Ph.D. Thesis, Clarkson University, Potsdam, NY (2004).
    • (2004)
    • Gorantla, V.1
  • 27
    • 33744808492 scopus 로고    scopus 로고
    • Paper 1707 presented at the 27 April - 2 May Meeting of The Electrochemical Society, Paris, France
    • J. Jayashankar, U. Patri, and E. Johns, Paper 1707 presented at the 27 April - 2 May Meeting of The Electrochemical Society, Paris, France, 2003.
    • (2003)
    • Jayashankar, J.1    Patri, U.2    Johns, E.3
  • 32
    • 0004192071 scopus 로고
    • Butterworths, Washington DC
    • C. W. Davies, Ion Association, p. 17, Butterworths, Washington DC (1962).
    • (1962) Ion Association , pp. 17
    • Davies, C.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.