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Volumn 200, Issue 5-6, 2005, Pages 1604-1608
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Infrared thermography-assisted detection of surface alteration during plasma cleaning and implications on subsequently deposited magnetron sputtered films
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Author keywords
Magnetron sputtering; Plasma cleaning; Thermography
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Indexed keywords
ALUMINUM;
CHEMICAL CLEANING;
FILMS;
ION BOMBARDMENT;
MAGNETRON SPUTTERING;
PLASMA APPLICATIONS;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
STEEL;
SURFACE TOPOGRAPHY;
TEMPERATURE DISTRIBUTION;
THERMOGRAPHY (IMAGING);
MAGNETRON SPUTTERED FILMS;
PLASMA CLEANING;
SURFACE ALTERATION;
THERMOGRAPHY-ASSISTED DETECTION;
SURFACE TREATMENT;
COATING;
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EID: 28944432477
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.038 Document Type: Article |
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Times cited : (4)
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References (7)
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