Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structural waveguide

Journal of Zhejiang University: Science

Volumn 7, Issue 3, 2006, Pages 472-476

  Xu, Xuan Qian ^a   Ye, Hui ^a   Zou, Tong ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Orientation; Sputtering; Thin film; Titanium nitride; Waveguide

Indexed keywords

CHARACTERIZATION; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTRODES; MAGNETRON SPUTTERING; MORPHOLOGY; OPTIMIZATION; PROBES; SUBSTRATES; TEMPERATURE; TITANIUM NITRIDE; WAVEGUIDES;

FOUR POINT PROBE; ORIENTATION; REACTING GAS; SURFACE MORPHOLOGY;

THIN FILMS;

EID: 33646375185     PISSN: 10093095     EISSN: None     Source Type: Journal    
DOI: 10.1631/jzus.2006.A0472     Document Type: Article

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