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Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 228-233

Investigation of substoichiometric titanium nitride grown by unbalanced magnetron sputtering

(6) Yang, S a Lewis, D B b Wadsworth, I b Cawley, J b Brooks, J S b Munz W D b

a TEER COATINGS LTD (United Kingdom)

b SHEFFIELD HALLAM UNIVERSITY (United Kingdom)

Author keywords

Diffraction; Fold rotation; Multiphase; Sputtering; Substoichiometric; TiN

Indexed keywords

COATING; DEPOSITION; SPUTTERING; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0034528289 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00828-8 Document Type: Conference Paper

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.