Single-crystal SiC thin-film produced by epitaxial growth and its application to micro-mechanical devices

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5344-5348

  Moronuki, Nobuyuki ^a   Kojima, Masayuki ^a   Kakuta, Akira ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Actuator; Biomorph; Cantilever; Micro structure; Silicon; Silicon carbide; Single crystal

Indexed keywords

ELASTIC MODULI; EPITAXIAL GROWTH; LITHOGRAPHY; MICROMECHANICS; MOLECULAR BEAM EPITAXY; SILICON CARBIDE; SINGLE CRYSTALS;

BIOMORPHS; BULK MATERIALS; MICROMECHANICAL DEVICES; MICROSCOPIC CANTILEVERS;

THIN FILMS;

EID: 43949099279     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.053     Document Type: Article

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