A single crystal SiC plug-and-play high temperature drag force transducer

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 400-403

  Okojie, R S ^a   Fralick, G C ^a   Saad, G J ^a   Blaha, C A ^b   Adamczyk, J J ^a   Feiereisen, J M ^c  

^a NASA GLENN RESEARCH CENTER   (United States)

^b Akima Corporation   (United States)

^c PRATT AND WHITNEY   (United States)

Author keywords

Capacitive sensors; Drag; Engines; Packaging; Piezoresistance; Silicon carbide; Structural beams; Temperature sensors; Transducers; Turbines

Indexed keywords

ACTUATORS; BRIDGE CIRCUITS; CAPACITIVE SENSORS; DRAG; ENGINES; FLOW VELOCITY; GAS TURBINES; MICROSYSTEMS; PACKAGING; SEMICONDUCTING SILICON; SILICON; SILICON CARBIDE; SILICON WAFERS; SINGLE CRYSTALS; TEMPERATURE SENSORS; TRANSDUCERS; TURBINES; TURBULENCE;

6H-SILICON CARBIDES; FUNCTIONAL CAPABILITIES; LOWER TEMPERATURES; PIEZO-RESISTIVE SENSORS; PIEZORESISTANCE; SILICON-BASED SENSORS; STRUCTURAL BEAMS; WHEATSTONE BRIDGE CIRCUITS;

SOLID-STATE SENSORS;

EID: 36049038259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215338     Document Type: Conference Paper

References (6)

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