SiC/Si-dots multilayer structures formed by supersonic free jets of CH 3SiH3 and Si3H8

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2492-2495

  Ikoma, Yoshifumi ^a   Ohtani, Ryota ^a   Matsui, Nobuaki ^a   Motooka, Teruaki ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; FILM GROWTH; JETS; MULTILAYERS; SILANES; SPUTTERING; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

RESONANT TUNNELING DIODES (RTD); SUPERSONIC FREE JETS;

SILICON CARBIDE;

EID: 0942288903     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. H. C. Liu, D. Landheer, M. Buchanan, and D. C. Houghton, Appl. Phys. Lett. 52, 1809 (1988).
2. K. Ismail, B. S. Meyerson, and P. J. Wang, Appl. Phys. Lett. 59, 973 (1991).
3. M. Tsutsui, M. Watanabe, and M. Asada, Jpn. J. Appl. Phys., Part 2 38, L920 (1999).
4. K. Yuki, Y. Hirai, K. Morimoto, K. Morita, and T. Uenoyama, J. Vac. Sci. Technol. B 14, 4068 (1996).
5. M. Fukuda, K. Nakagawa, S. Miyazaki, and M. Hirose, Appl. Phys. Lett. 70, 2291 (1997).
6. T. Toyama, Y. Kotani, H. Okamoto, and H. Kida, Appl. Phys. Lett. 72, 1489 (1998).
7. U. Baumann, J. Pezoldt, V. Cimalla, O. Nennewitz, F. Schwierz, and D. Schipanski, in Silicon Carbide and Related Materials 1995, Institute of Physics Conference Series, No. 142, edited by S. Nakashima, H. Matsunami, S. Yoshida, and H. Harima (Institute of Physics, Bristol, 1996), p. 149.
8. Q. Wahab, L. Hultman, I. P. Ivanov, M. Willander, and J.-E. Sundgren, J. Mater. Res. 10, 1349 (1995).
9. L.-O.. Björketun, L. Hultman, O. Kordina, and J.-E. Sundgren, J. Mater. Res. 13, 2632 (1998).
10. Y. Ikoma, T. Endo, F. Watanabe, and T. Motooka, Appl. Phys. Lett. 75, 3977 (1999).
11. Y. Ikoma, T. Endo, T. Tada, F. Watanabe, and T. Motooka, Mater. Sci. Forum 338-342, 265 (2000).
12. Y. Ikoma, T. Tada, K. Uchiyama, F. Watanabe, and T. Motooka, Solid State Phenom. 78-79, 157 (2001).
13. Y. Ikoma, K. Uchiyama, F. Watanabe, and T. Motooka, Mater. Sci. Forum 389-393, 751 (2002).
14. Y. Ikoma, T. Endo, F. Watanabe, and T. Motooka, J. Vac. Sci. Teehnol. A 16, 763 (1998).
15. Y. Ikoma, T. Endo, F. Watanabe, and T. Motooka, Jpn. J. Appl. Phys., Part 2 38, L301 (1999).
16. W. Kern and D. A. Puotinen, RCA Rev. 31, 187 (1970).
17. J. B. Anderson, Molecular Beams and Low Density Gasdynamics, edited by P. P. Wegener (Dekker, New York, 1974).