Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution

Applied Physics A: Materials Science and Processing

Volumn 91, Issue 4, 2008, Pages 567-571

  Meijer, J ^a   Pezzagna, S ^a   Vogel, T ^a   Burchard, B ^a   Bukow, H H ^a   Rangelow, I W ^b   Sarov, Y ^b   Wiggers, H ^c   Plumel I ^c   Jelezko, F ^d   Wrachtrup, J ^d   Schmidt Kaler, F ^e   Schnitzler, W ^e   Singer, K ^e  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF DUISBURG ESSEN   (Germany)

^d UNIVERSITY OF STUTTGART   (Germany)

^e UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; NANOPARTICLES; OPTICAL RESOLVING POWER; QUANTUM THEORY;

MOLECULAR IONS; QUANTUM SOLID STATE DEVICES; SINGLE ATOMIC IONS;

IONS;

EID: 43449101172     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4515-1     Document Type: Article

References (22)

1. A.R. Stegner, C. Boehme, H. Huebl, M. Stutzmann, K. Lips, M.S. Brandt, Nature Phys. 2, 835 (2006)
2. S.R. Schofield, N.J. Curson, M.Y. Simmons, F.J. Rue, T. Hallam, L. Oberbeck, R.G. Clark, Phys. Rev. Lett. 91, 136104 (2003)
3. J. Meijer, B. Burchard, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, J. Wrachtrup, Appl. Phys. Lett. 87, 261909 (2005)
4. T. Gaebel, M. Domhan, I. Popa, C. Wittmann, P. Neumann, F. Jelezko, J.R. Rabeau, N. Stavrias, A.D. Greentree, S. Prawer, J. Meijer, J. Twamley, P.R. Hemmer, J. Wrachtrup, Nature Phys. 2, 408 (2006)
5. J. Meijer, T. Vogel, B. Burchard, I.V. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S.A. Schulz, K. Singer, F. Schmidt-Kaler, Appl. Phys. 83, 321 (2006)
6. P. Tamarat, T. Gaebel, J.R. Rabeau, M. Khan, A.D. Greentree, H. Wilson, L.C.L. Hollenberg, S. Prawer, P.R. Hemmer, F. Jelezko, J. Wrachtrup, Phys. Rev. Lett. 97, 083002 (2006)
7. U.S. and German Patents DE 10,347,969: Device and Method of Positional Accurate Implantation of Individual Particles in a Substrate Surface, inventors: J. Meijer, I.W. Rangelow, T. Schenkel, assignees: U.C. Berkeley, Universität Gh Kassel, German and U.S. Patents submitted Oct. 2003, assignation 2006
8. A. Persaud, K. Ivanova, Y. Sarov, T. Ivanov, B.E. Volland, I.W. Rangelow, N. Nikolov, T. Schenkel, V. Djakov, D.W.K. Jankins, T. Vogel, J. Meijer, J. Vac. Sci. Technol. B 24(6) (2006)
9. I.W. Rangelow, P. Grabiec, T. Gotszalk, K. Edingeret, Surf. Interface Anal. 33, 59 (2002)
10. I.W. Rangelow, Microelectron. Eng. 83, 1449 (2006)
11. F. Jelezko, T. Gaebel, I. Popa, A. Gruber, J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004)
12. F. Jelezko, T. Gaebel, I. Popa, M. Domhan, A. Gruber, J. Wrachtrup, Phys. Rev. Lett. 93, 130501 (2004)
13. E. Wu, J.R. Rabeau, G. Roger, F. Treussart, H. Zeng, P. Grangier, S. Prawer, J.-F. Roch, New J. Phys. 9, 434 (2007)
14. C. Wang, C. Kurtsiefer, H. Weinfurter, B. Burchard, J. Phys. B 39, 37 (2005)
15. C. Kreuzer, J. Riedrich-Möller, E. Neu, C. Becher, Opt. Express 16, 1632 (2008)
16. F. Jelezko, J. Wrachtrup, Phys. Stat. Solidi A 203, 3207 (2006)
17. J. Meijer, A. Stephan, J. Adamczewski, H. Röcken, U. Weidenmüller, H.H. Bukow, C. Rolfs, Nucl. Instrum. Methods B 158, 39 (1999)
18. T. Gaebel, I. Popa, A. Gruber, M. Domhan, F. Jelezko, J. Wrachtrup, New J. Phys. 6, 98 (2004)
19. T. Schenkel, A. Persaud, S.J. Park, J. Meijer, J.R. Kingsley, J.W. McDonald, J.P. Holder, J. Bokor, D.H. Schneider, J. Vac. Sci. Technol. B 20, 2819 (2002)
20. T. Schenkel, A.V. Hamza, A.V. Barnes, D.H. Schneider, J.C. Banks, B.L. Doyle, Phys. Rev. Lett. 81, 2590 (1998)
21. D.N. Jamieson, C. Yang, T. Hopf, S.M. Hearne, C.I. Pakes, S. Prawer, M. Mitic, E. Gauja, S.E. Andresen, F.E. Hudson, A.S. Dzurak, R.G. Clark, Appl. Phys. Lett. 86, 202101 (2005)
22. K. Hitzbleck, H. Wiggers, P. Roth, Appl. Phys. Lett. 87, 093105 (2005)