Spectrometry of 0.46 and 13.56 MHz Ar/SF 6 inductive plasma discharges

Journal of Applied Physics

Volumn 96, Issue 4, 2004, Pages 1811-1818

  Tuszewski, M ^a   Scarborough, W K ^a   White, R R ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FARADAY SHIELDS; GAS MIXTURES; LANGMUIR PROBES (LP); PLASMA DISCHARGES;

ARGON; DIELECTRIC MATERIALS; ETCHING; INTERFEROMETRY; LIGHT EMISSION; MASS SPECTROMETRY; MIXTURES; OXYGEN; PARTIAL PRESSURE; PHOTOMULTIPLIERS; PLASMA FLOW; QUARTZ; SILICON; SULFUR COMPOUNDS;

INDUCTIVELY COUPLED PLASMA;

EID: 4344690859     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1769599     Document Type: Article

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