Silicon crystal heating and thermocouple mounting designs

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 182-186

  Nishino, H ^a   Yang, W ^a   Dohnalek Z ^a   Ukraintsev, V A ^a   Choyke, W J ^a   Yates Jr , J T ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031538721     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580461     Document Type: Article

References (13)

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13. 3 - 13.433 × exp(-1.2334×V), where T is the temperature in Kelvin and V is the thermoelectric voltage of the W26% Re/W5 % Re thermocouple in mV. The deviations of this fitting from the real temperature data are slightly less than those of the polynomial equation fitting proposed by V. S. Smentkowski and J. T. Yates, Jr. [J. Vac. Sci. Technol. A 14, 260 (1996)].