Control of silicon crystal temperature by measurement of resistivity

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2766-2769

  Dohnalek Z ^a   Mezhenny, S ^a   Lyubinetsky, I ^a   Choyke, W J ^a   Yates Jr , J T ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031490759     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580820     Document Type: Article

References (9)

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