Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C 8F 18) vapor. II. Dielectric and insulating properties

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1158-1165

  Biloiu, Costel ^a,c   Biloiu, Loana Arabela ^a,c   Sakai, Yosuke ^b   Sugawara, Hirotake ^b   Ohta, Akitsugu ^b  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b HOKKAIDO UNIVERSITY   (Japan)

^c UNIVERSITY OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION BANDS; DIELECTRIC STRENGTH; FILM THICKNESS; MICROMETER RESOLUTION;

CAPACITANCE; CROSSLINKING; CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC FILMS; ELASTOMERS; ELECTRIC BREAKDOWN; ELECTRIC INSULATORS; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONICS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY;

ORGANIC POLYMERS;

EID: 4344612141     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1759354     Document Type: Article

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