Nanometer-scale modification of tribomechanical properties of Si(111):H surfaces performed and investigated by a conducting-probe scanning force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1268-1271

  Teuschler, T ^a   Mahr, K ^a   Miyazaki, S ^a,b   Hundhausen, M ^a   Ley, L ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001453195     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588529     Document Type: Article

References (20)

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