A micromechanical flow sensor for microfluidic applications

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 576-585

  Czaplewski, David A ^a,b   Ilic, Bojan Rob ^c   Zalalutdinov, Maxim ^c   Olbricht, William L ^c   Zehnder, Alan T ^d   Craighead, Harold G ^c   Michalske, Terry A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Cornell University ^*  (United States)

^c Cornell University   (United States)

^d Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; ENCAPSULATION; FLOW MEASUREMENT; FLOWMETERS; INSTRUMENT TESTING; LASER APPLICATIONS; MICROELECTRONIC PROCESSING; MICROSENSORS; SURFACES; VISCOSITY;

DYNAMIC VISCOSITIES; LASER DEFLECTION SYSTEM; MICROFLUIDIC FLOW METER; MICROMECHANICAL FLOW SENSOR; MICROMECHANICAL PLATE;

MICROELECTROMECHANICAL DEVICES;

EID: 4344559691     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832179     Document Type: Article

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