A parylene MEMS flow sensing array

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 686-689

  Meng, E ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

Biomembranes; Biosensors; Chemical sensors; Etching; Micromechanical devices; Sensor arrays; Silicon; Thermal conductivity; Thermal resistance; Thermal sensors

Indexed keywords

BIOCOMPATIBILITY; BIOSENSORS; MEMS; MICROSYSTEMS; SENSOR ARRAYS; SILICON; SOLID-STATE SENSORS; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY;

BIOMEMBRANES; BULK-MICROMACHINED; FLOW SENSING; LOWS-TEMPERATURES; MEMS THERMAL SENSORS; METALLICS; MICROMECHANICAL DEVICE; PARYLENES; SENSORS ARRAY; THERMAL SENSORS;

TEMPERATURE;

EID: 84944741631     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215566     Document Type: Conference Paper

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