Various applications of resonant pressure sensor chip based on 3-D micromachining

Sensors and Actuators, A: Physical

Volumn 73, Issue 3, 1999, Pages 261-266

  Harada, Kinji ^a   Ikeda, Kyoichi ^b   Kuwayama, Hideki ^c   Murayama, Hidekazu ^c  

^a Engineering Department   (Japan)

^b Yokogawa Electric   (Japan)

^c Yokogawa Electiic Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BAROMETERS; CAVITY RESONATORS; MANOMETERS; MICROMACHINING; SEMICONDUCTING SILICON; VACUUM APPLICATIONS;

PRESSURE SENSOR;

MICROSENSORS;

EID: 0032655064     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00245-3     Document Type: Article

References (13)

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