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Volumn 26, Issue 3, 2008, Pages 365-369

Development of a compact vacuum- and hydrogen-annealing machine for surface transformation of silicon and its applications to micro-optical devices

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; OPTICAL DEVICES; PARTIAL PRESSURE; SILICON; TEMPERATURE CONTROL; TEMPERATURE DISTRIBUTION;

LAMELLAR GRATING; MACHINE SIZES; MICROLENSLIKE STRUCTURES; SURFACE TRANSFORMATION;

VACUUM;

EID: 42949097548 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.2897317 Document Type: Article

Times cited : (24)

References (11)

1
- 0000204693
- 0003-6951 10.1063/1.112818.
- N. Sato and T. Yonehara, Appl. Phys. Lett. 0003-6951 10.1063/1.112818 65, 1924 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1924
- Sato, N.¹ Yonehara, T.²

2
- 1842760714
- 0021-4922 10.1143/JJAP.43.12.
- T. Sato, I. Mizushima, S. Taniguchi, K. Takenaka, S. Shimonishi, H. Hayashi, M. Hatano, K. Sugihara, and Y. Tsunashima, Jpn. J. Appl. Phys., Part 1 0021-4922 10.1143/JJAP.43.12 43, 12 (2004).
- (2004) Jpn. J. Appl. Phys., Part 1 , vol.43 , pp. 12
- Sato, T.¹ Mizushima, I.² Taniguchi, S.³ Takenaka, K.⁴ Shimonishi, S.⁵ Hayashi, H.⁶ Hatano, M.⁷ Sugihara, K.⁸ Tsunashima, Y.⁹

3
- 4644354273
- 0169-4332
- R. Hiruta, H. Kuribayashi, S. Shimizu, K. Sudoh, and H. Iwasaki, Appl. Surf. Sci. 237, 63 (2004). 0169-4332
- (2004) Appl. Surf. Sci. , vol.237 , pp. 63
- Hiruta, R.¹ Kuribayashi, H.² Shimizu, S.³ Sudoh, K.⁴ Iwasaki, H.⁵

4
- 2942527629
- 0021-4922 10.1143/JJAP.43.L468.
- H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh, and H. Iwasaki, Jpn. J. Appl. Phys., Part 2 0021-4922 10.1143/JJAP.43.L468 43, L468 (2004).
- (2004) Jpn. J. Appl. Phys., Part 2 , vol.43 , pp. 468
- Kuribayashi, H.¹ Hiruta, R.² Shimizu, R.³ Sudoh, K.⁴ Iwasaki, H.⁵

5
- 0034268815
- 0021-4922 10.1143/JJAP.39.5033.
- T. Sato, K. Mitsutake, I. Mizushima, and Y. Tsunashima, Jpn. J. Appl. Phys., Part 1 0021-4922 10.1143/JJAP.39.5033 39, 5033 (2000).
- (2000) Jpn. J. Appl. Phys., Part 1 , vol.39 , pp. 5033
- Sato, T.¹ Mitsutake, K.² Mizushima, I.³ Tsunashima, Y.⁴

6
- 0042029738
- 0734-2101 10.1116/1.1586278.
- H. Kuribayashi, R. Hiruta, R. Shimizu, K. Sudoh, and H. Iwasaki, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1586278 21, 1279 (2003).
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 1279
- Kuribayashi, H.¹ Hiruta, R.² Shimizu, R.³ Sudoh, K.⁴ Iwasaki, H.⁵

7
- 33645757830
- 1057-7157 10.1109/JMEMS.2005.859092.
- M. -C. M. Lee and M. C. Wu, J. Microelectromech. Syst. 1057-7157 10.1109/JMEMS.2005.859092 15, 338 (2006).
- (2006) J. Microelectromech. Syst. , vol.15 , pp. 338
- Lee, M.-C.M.¹ Wu, M.C.²

8
- 0001749527
- 0146-9592 10.1364/OL.26.001888.
- K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, Opt. Lett. 0146-9592 10.1364/OL.26.001888 26, 1888 (2001).
- (2001) Opt. Lett. , vol.26 , pp. 1888
- Lee, K.K.¹ Lim, D.R.² Kimerling, L.C.³ Shin, J.⁴ Cerrina, F.⁵

9
- 0029375617
- 0013-4651 10.1149/1.2048694.
- H. Habuka, H. Tsunoda, M. Mayusumi, N. Tate, and M. Katayama, J. Electrochem. Soc. 0013-4651 10.1149/1.2048694 142, 3092 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 3092
- Habuka, H.¹ Tsunoda, H.² Mayusumi, M.³ Tate, N.⁴ Katayama, M.⁵

10
- 15544378397
- 0960-1317 10.1088/0960-1317/15/3/020.
- C. Chang, Y. -F. Wang, Y. Kanamori, J. -J. Shih, Y. Kawai, C. -K. Lee, K. -C. Wu, and M. Esashi, J. Micromech. Microeng. 0960-1317 10.1088/0960-1317/15/ 3/020 15, 580 (2005).
- (2005) J. Micromech. Microeng. , vol.15 , pp. 580
- Chang, C.¹ Wang, Y.-F.² Kanamori, Y.³ Shih, J.-J.⁴ Kawai, Y.⁵ Lee, C.-K.⁶ Wu, K.-C.⁷ Esashi, M.⁸

11
- 42949150662
- Electromagnetic Theory of Gratings, edited by R. Petit (Springer-Verlag, Berlin).
- Electromagnetic Theory of Gratings, edited by, R. Petit, (Springer-Verlag, Berlin, 1980).
- (1980)

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