RF sputtered piezoelectric zinc oxide thin film for transducer applications

Journal of Materials Science: Materials in Electronics

Volumn 19, Issue 7, 2008, Pages 653-661

  Hsu, Yu Hsiang ^a   Lin, John ^a   Tang, William C ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; PIEZOELECTRIC MATERIALS; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; SPUTTER DEPOSITION; STRESS RELAXATION; THIN FILMS; TRANSDUCERS;

PIEZOELECTRIC THIN FILM; RADIO-FREQUENCY SPUTTERING SYSTEM; TRANSDUCER APPLICATIONS; ZINC OXIDE THIN FILM;

ZINC OXIDE;

EID: 42649125281     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9415-1     Document Type: Article

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