Electrical properties of zinc oxide sputtered thin films

Microelectronics Journal

Volumn 34, Issue 11, 2003, Pages 1087-1092

  Ondo Ndong, R ^a   Ferblantier, G ^a   Pascal Delannoy, F ^a   Boyer, A ^a   Foucaran, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Conductivity; Dielectric properties; Electrical properties; ZnO

Indexed keywords

POLARON TUNNELING;

CHARGE CARRIERS; DIELECTRIC PROPERTIES; ELECTRODES; MAGNETRON SPUTTERING; SANDWICH STRUCTURES; ZINC OXIDE;

THIN FILMS;

EID: 0142154037     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00198-8     Document Type: Article

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