Precision patterning of PDMS membranes and applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Tong, Jianhua ^a   Simmons, Craig A ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MICROLENSES; PARAMETER ESTIMATION; POLYDIMETHYLSILOXANE;

PARYLENE C LIFT-OFF; PDMS MEMBRANES; PRECISION PATTERNING;

POLYMERIC MEMBRANES;

EID: 42549171022     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/037004     Document Type: Article

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