Microlens fabrication using an etched glass master

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 339-342

  Zhang, P ^a   Londe, G ^b   Sung, J ^b   Johnson, E ^b   Lee, M ^c   Cho, H J ^a  

^a University of Central Florida   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

^c Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GLASS; MICROMACHINING; SUBSTRATES;

CONFORMAL ANTIADHESION LAYER; HOT EMBOSSING; ISOTROPIC ETCHING; NUMERICAL APERTURE;

MICROLENSES;

EID: 33845771831     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0217-9     Document Type: Article

References (5)

1. Daly D, Steven RF, Hutley CM, Da vies N (1990) The manufacture of microlenses by melting photoresist. Meas Sci Technol 1:759-766
2. Jeong KH, Lee LP (2002) A new method of increasing numerical aperture of microlens for biophotonic MEMS presented at Microtechnologies in Medicine and Biology In: 2nd Annual International 1EEE-EMB special topic conference
3. Morgan B, Waits CM, Krizmanic J, Ghodssi R (2004) Development of a deep silicon phase fresnel lens using gray-scale lithography and deep reactive ion etching. J Microelectromech Syst 13:113-120
4. Nilsson D, Balslev S Kristensen A (2004) A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC). J Micromech Microeng 15:296-300
5. Park EH, Kim MJ, K won YS (1999) New fabrication technology of convex and concave microlens using UVcuring method. Presented at Lasers and Electro-Optics Society 1999 In: 12th Annual Meeting. LEOS '99