Electrical discharge machining of carbon nanomaterials in air: Machining characteristics and the advanced field emission applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Ok, Jong Girl ^a,b   Kim, Bo Hyun ^c   Chung, Do Kwan ^b   Sung, Woo Yong ^b   Lee, Seung Min ^b   Lee, Se Won ^b   Kim, Wal Jun ^b   Park, Jin Woo ^b   Chu, Chong Nam ^b   Kim, Yong Hyup ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Seoul National University   (South Korea)

^c Andong National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CONTAMINATION; ELECTRIC DISCHARGE MACHINING; FIELD EMISSION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NANOMATERIALS; EMISSION UNIFORMITY;

NANOSTRUCTURED MATERIALS;

EID: 42549147823     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025007     Document Type: Article

References (41)

1. Iijima S 1991 Helical microtubules of graphitic carbon Nature 354 56-8
2. Chen Y, Patel S, Ye Y, Shaw D T and Guo L 1998 Field emission from aligned high-density graphitic nanofibers Appl. Phys. Lett. 73 2119-21
3. Tanaka K, Yoshimura M, Okamoto A and Ueda K 2005 Synthesis of carbon nanocoils by two-step growth method using microwave plasma-enhanced chemical vapor deposition Japan. J. Appl. Phys. 44 L1158-60
4. de Heer W A, Chatelain A and Ugarte D 1995 A carbon nanotube field-emission electron source Science 270 1179-80
5. Saito Y and Uemura S 2000 Field emission from carbon nanotubes and its application to electron sources Carbon 38 169-82
6. Lee S, Im W B, Kang J H and Jeon D Y 2005 Low temperature burnable carbon nanotube paste component for carbon nanotube field emitter backlight unit J. Vac. Sci. Technol. B 23 745-8
7. Li J and Zhang Y 2006 Cutting of multi-walled carbon nanotubes Appl. Surf. Sci. 252 2944-8
8. Bai X, Li D, Du D, Zhang H, Chen L and Liang J 2004 Laser irradiation for purification of aligned carbon nanotube films Carbon 42 2125-7
9. Yuzvinsky T D, Fennimore A M, Mickelson W, Esquivias C and Zettl A 2005 Precision cutting of nanotubes with a low-energy electron beam Appl. Phys. Lett. 86 053109
10. Rubio A, Apell S P, Venema L C and Dekker C 2000 A mechanism for cutting carbon nanotubes with a scanning tunneling microscope Eur. Phys. J. B 17 301-8
11. Stepanek I, Maurin G, Bernier P, Gavillet J, Loiseau A, Edwards R and Jaschinski O 2000 Nano-mechanical cutting and opening of single wall carbon nanotubes Chem. Phys. Lett. 331 125-31
12. Park J Y, Yaish Y, Brink M, Rosenblatt S and McEuen P L 2002 Electrical cutting and nicking of carbon nanotubes using an atomic force microscope Appl. Phys. Lett. 80 4446-8
13. Lu S and Panchapakesan B 2006 Nanotube micro-optomechanical actuators Appl. Phys. Lett. 88 253107
14. Masuzawa T 2000 State of the art of micromachining Ann. CIRP 49/2 473-88
15. Wong Y S, Rahman M, Lim H S, Han H and Ravi N 2003 Investigation of micro-EDM material removal characteristics using single RC-pulse discharges J. Mater. Process. Technol. 140 303-7
16. McGeough J A 1988 Advanced Methods of Machining (London: Chapman and Hall)
17. Livshits A L 1960 Electro-erosion Machining of Metals (London: Butterworth)
18. Allen D M and McGeough J A 2002 Micromachining of Engineering Materials (New York: Dekker)
19. Sung W Y, Ok J G, Kim W J, Lee S M, Yeon S C, Lee H Y and Kim Y H 2007 Synthesis and field emission characteristics of carbon nanocoils with a high aspect ratio supported by copper micro-tips Nanotechnology 18 245603
20. Chung D K, Kim B H and Chu C N 2007 Micro electrical discharge milling using deionized water as a dielectric fluid J. Micromech. Microeng. 17 867-74
21. Kim B H, Park B J and Chu C N 2006 Fabrication of multiple electrodes by reverse EDM and their application in micro ECM J. Micromech. Microeng. 16 843-50
22. Kim B H, Ok J G, Kim Y H and Chu C N 2007 Ann. CIRP 56/1 233-6
23. Jilani S T and Pandey P C 1986 Plasma channel growth and the resolidified layer in EDM Precis. Eng. 8 104-10
24. Dean K A and Chalamala B R 1999 The environmental stability of field emission from single-walled carbon nanotubes Appl. Phys. Lett. 75 3017-9
25. Ok J G, Kim B H, Sung W Y, Chu C N and Kim Y H 2007 Uniformity enhancement of carbon nanofiber emitters via electrical discharge machining Appl. Phys. Lett. 90 033117
26. Behnam A, Choi Y, Noriega L, Wu Z, Kravchenko I, Rinzler A G and Ural A 2007 Nanolithographic patterning of transparent, conductive single-walled carbon nanotube films by inductively coupled plasma reactive ion etching J. Vac. Sci. Technol. B 25 348-54
27. Teo K B K, Chhowalla M, Amaratunga G A J, Milne W I, Hasko D C, Pirio G, Legagneux P, Wyczisk F and Pribat D 2001 Uniform patterned growth of carbon nanotubes without surface carbon Appl. Phys. Lett. 79 1534-6
28. Vieira S M C, Teo K B K, Milne W I, Groening O, Gangloff L, Minoux E and Legagneux P 2006 Investigation of field emission properties of carbon nanotube arrays defined using nanoimprint lithography Appl. Phys. Lett. 89 022111
29. Sohn J I, Lee S, Song Y H, Choi S Y, Cho K I and Nam K S 2001 Patterned selective growth of carbon nanotubes and large field emission from vertically well-aligned carbon nanotube field emitter arrays Appl. Phys. Lett. 78 901-3
30. Cheong F C, Lim K Y, Sow C H, Lin J and Ong C K 2003 Large area patterned arrays of aligned carbon nanotubes via laser trimming Nanotechnology 14 433-7
31. Liu P, Liu L, Wei Y, Sheng L and Fan S 2006 Enhanced field emission from imprinted carbon nanotube arrays Appl. Phys. Lett. 89 073101
32. Huang J, Fan R, Connor S and Yang P 2007 One-step patterning of aligned nanowire arrays by programmed dip coating Angew. Chem. Int. Ed. 46 2414-7
33. Nilsson L, Groening O, Emmenegger C, Kuettel O, Schaller E, Schlapbach L, Kind H, Bonard J-M and Kern K 2000 Scanning field emission from patterned carbon nanotube films Appl. Phys. Lett. 76 2071-3
34. Suh J S, Jeong K S, Lee J S and Han I 2002 Study of the field-screening effect of highly ordered carbon nanotube arrays Appl. Phys. Lett. 80 2392-4
35. Choi W B, Jin Y W, Kim H Y, Lee S J, Yun M J, Kang J H, Choi Y S, Park N S, Lee N S and Kim J M 2001 Electrophoresis deposition of carbon nanotubes for triode-type field emission display Appl. Phys. Lett. 78 1547-9
36. Fujii S, Honda S-I, Machida H, Kawai H, Ishida K, Katayama M, Furuta H, Hirao T and Oura K 2007 Efficient field emission from an individual aligned carbon nanotube bundle enhanced by edge effect Appl. Phys. Lett. 90 153108
37. Choi Y S et al 2001 An under-gate triode structure field emission display with carbon nanotube emitters Diamond Relat. Mater. 10 1705-8
38. Han I T, Kim H J, Park Y J, Lee N S, Jang J E, Kim J W, Jung J E and Kim J M 2002 Fabrication and characterization of gated field emitter arrays with self-aligned carbon nanotubes grown by chemical vapor deposition Appl. Phys. Lett. 81 2070-2
39. Lee J H, Lee M B, Hahm S H, Lee J H, Seo H I, Kwon D H, Kim J S and Choi K M 2003 Lateral field emitter arrays with high emission currents and wide operation region by high field activation J. Vac. Sci. Technol. B 21 506-10
40. Jung Y J, Son G H, Park J H, Kim Y W, Berdinsky A S, Yoo J B and Park C Y 2005 Fabrication and properties of under-gated triode with CNT emitter for flat lamp Diamond Relat. Mater. 14 2109-12
41. Wong Y M, Kang W P, Davidson J L, Hofmeister W, Wei S and Huang J H 2005 Device characterization of carbon nanotubes field emitters in diode and triode configurations Diamond Relat. Mater. 14 697-703