Characterization of sol-gel prepared WO3́ thin films as a gas sensor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1873-1879

  Cantalini, C ^a   Atashbar, M Z ^b   Li, Y ^b   Ghantasala, M K ^b   Santucci, S ^a   Wlodarski, W ^b   Passacantando, M ^a  

^a Department of Chemistry and Materials ^*  (Italy)

^b RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AIR EXPOSURE; ANNEALING TEMPERATURES; CRYSTALLINE STRUCTURE; ELECTRICAL RESISTANCES; GAS SENSORS; HIGHER TEMPERATURES; POLYCRYSTALLINE STRUCTURE; RESPONSE TIME; SEM; SEM ANALYSIS; TUNGSTEN TRIOXIDE; XPS CHARACTERIZATION;

AMORPHOUS FILMS; ANNEALING; GELS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; TUNGSTEN; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM PREPARATION;

EID: 33645493586     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581698     Document Type: Conference Paper

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