Gas-sensing properties of sputtered thin films of tungsten oxide

Journal of Physics D: Applied Physics

Volumn 30, Issue 23, 1997, Pages 3211-3215

  Di Giulio, M ^a   Manno, D ^a   Micocci, G ^a   Serra, A ^a   Tepore, A ^a  

^a UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTRIC RESISTANCE; HALL EFFECT; MAGNETIC VARIABLES MEASUREMENT; MORPHOLOGY; OXIDES; SPUTTER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

REACTIVE RADIOFREQUENCY SPUTTERING; TUNGSTEN OXIDE THIN FILMS;

TUNGSTEN COMPOUNDS;

EID: 0031558864     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/23/005     Document Type: Article

References (20)

1. Madou J and Morrison S R 1989 Chemical Sensing with Solid State Devices (London: Academic)
2. Svensson J S E M and Granqvist C G 1984 Solar Energy Mater. 11 29
3. Bosch H and Janssen F 1988 Catal. Today 2 424
4. Sberveglieri G, Depero L, Groppelli S and Nelli P 1995 Sensors Actuators B 26-27 89
5. LeGore J, Snow K, Galipeau J D and Vetelino J F 1996 Sensors Actuators B 35-36 164
6. Antonik D, Schneider J E, Wittman E L, Snow K, Vetelino J F and Lad R J 1995 Thin Solid Films 256 247
7. Cantalini C, Sun H T, Pelino M, Santucci S, Lozzi L and Passacantando M 1996 Thin Solid Films 287 258
8. Akiyama M, Zhang Z, Tanaki J, Harada T, Miura N and Yamazoe Y 1992 Technical Digest 11th Sensor Symp. (Tokyo) Conference edition, p 181
9. Lin H M, Hsu C M, Yang H Y, Lee P Y and Yang C C 1994 Sensors Actuators B 22 63
10. Agrawal A and Habibi H 1989 Thin Solid Films 169 257
11. Armelao L, Bertonallo R, Granozzi G, Depaoli G, Tondello E and Battaglin G 1994 J. Mater. Chem. 4 407
12. Tracy E and Benson D K 1986 J. Vac. Sci. Technol. A 4 2377
13. Xu X, Vetelino J F, Lee R and Parker DC 1990 J. Vac. Sci. Technol. A 8 3634
14. Van der Pauw L J 1958 Philips Res. Rep. 13 1
15. Salje E 1977 Acta Crystallogr. B 33 574
16. Petritz L 1956 Phys. Rev. 104 1508
17. Orton W, Goldsmith B J, Chaoman J A and Powell M J 1982 J. Appl. Phys. 53 1602
18. Berger H 1961 Phys. Status Solidi 1 739
19. Manno D, Micocci G, Relia R, Serra A, Taurino A and Tepore A 1997 J. Appl. Phys. 82 54
20. Akiyama M, Zhang Z, Tamaki J, Miura N, Yamazoe N and Harada T 1993 Sensors Actuators B 13-14 619