A valveless micro impedance pump driven by PZT actuation

Materials Science Forum

Volumn 505-507, Issue PART 1, 2006, Pages 127-132

  Wen, C Y ^a   Cheng, C H ^a   Jian, C N ^a   Nguyen, T A ^a   Hsu, C Y ^a   Su, Y R ^a  

^a DA YEH UNIVERSITY   (Taiwan)

Author keywords

Electroforming; Micro impedance pump; PZT actuator; UV lithography; Valveless

Indexed keywords

ELECTROFORMING; EPOXY RESINS; FLOW OF FLUIDS; NICKEL COMPOUNDS; PHOTORESISTORS;

BOTTOM STRUCTURE PLATES; EPOXY ADHESIVE; MICRO IMPEDANCE PUMP; UV LITHOGRAPHY;

PIEZOELECTRIC ACTUATORS;

EID: 34249828096     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-990-3.127     Document Type: Conference Paper

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