A valve-less planar pump isotropically etched in silicon

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 87-91

  Olsson, Anders ^a   Enoksson, Peter ^a   Stemme, Göran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSERS (FLUID); ETCHING; MATHEMATICAL MODELS; NOZZLES; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON;

VALVELESS PLANAR PUMPS;

PUMPS;

EID: 0030091525     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/020     Document Type: Article

References (10)

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