Strain-sensing cryogenic field-effect transistor for integrated strain detection in GaAs/AlGaAs microelectromechanical systems

Applied Physics Letters

Volumn 68, Issue 26, 1996, Pages 3763-3765

  Beck, R G ^a   Eriksson, M A ^a   Westervelt, R M ^a   Campman, K L ^b   Gossard, A C ^b  

^a HARVARD UNIVERSITY   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000728594     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115999     Document Type: Article

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