Tunable AC thermal anemometry

Superlattices and Microstructures

Volumn 35, Issue 3-6, 2004, Pages 325-338

  Chung, Won Seok ^a   Kwon, Ohmyoung ^b   Choi, Du Seon ^c   Park, Seungho ^d   Choi, Young Ki ^e   Lee, Joon Sik ^a  

^a Seoul National University   (South Korea)

^b Korea University   (South Korea)

^c Korea Institute of Machine and Materials   (South Korea)

^d Hong Ik University   (South Korea)

^e Chung Ang University   (South Korea)

Author keywords

Alternating current; Hot wire; Phase lag; Thermal anemometry

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ETHANOL; HEAT FLUX; NUSSELT NUMBER; OPTIMIZATION; SPECIFIC HEAT; THERMOANALYSIS; VISCOSITY;

ALTERNATING CURRENTS; HOT-WIRE; PHASE LAG; THERMAL ANEMOMETRY;

FLOW MEASUREMENT;

EID: 4243179059     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2004.02.026     Document Type: Conference Paper

References (14)

1. Nguyen N.T. Micromachined flow sensors - a review. Flow Measurement and Instrumentation. 8:(1):1997;7-16.
2. Oosterbroek R.E., Lammerink T.S.J., Berenschot J.W., Krijnen G.J.M., Elwenspoek M.C., Ben A. A micromachined pressure/flow-sensor. Sensors and Actuators. 77:1999;167-177.
3. Neda T., Nakamura K., Takumi T. A polysilicon flow sensor for gas flow meters. Sensors and Actuators A. 54:1996;626-631.
4. Wu S., Lin Q., Yuen Y., Tai Y.-C. MEMS flow sensors for nano-fluidic applications. Sensors and Actuators A. 89:2001;152-158.
5. Okulan N., Henderson H.T., Ahn C.H. A pulsed mode micromachined flow sensor with temperature drift compensation. IEEE Transactions On Electron Devices. 40:(2):2000;340-347.
6. Gamage S.K., Okulan N., Henderson H.T. Behavior of bulk micromachined silicon flow sensor in the negative differential resistance regime. Journal of Micromechanics and Microengineering. 10:2000;421-429.
7. Toda K., Sanemasa I., Ishikawa K. Simple temperature compensation of thermal air-flow sensor. Sensors and Actuators A. 57:1996;197-201.
8. Qui L., Hein S., Obermeier E., Schubert A. Micro gas-flow sensor with integrated heat sink and flow guide. Sensors and Actuators A. 54:1996;547-551.
9. Bedö G., Fannasch H., Müller R. A silicon flow sensor for gases and liquids using AC measurements. Sensors and Actuators. 85:2000;124-132.
10. Durst F., Al-Salaymeh A., Jovanovic J. Theoretical and experimental investigations of a wide range thermal velocity sensor. Measurement Science and Technology. 12:2001;223-237.
11. Kuijk J., Lammerink T.S.J., Bree H.-E., Elwenspoek M., Fluitman J.H.J. Multi-parameter detection in fluid flows. Sensors and Actuators A. 46-47:1995;369-372.
12. Nguyen N.T., Kiehnscherf R. Low-cost silicon sensors for mass flow measurement of liquids and gases. Sensors and Actuators A. 49:1995;17-20.
13. Ashauer M., Glosch H., Hedrich F., Hey N., Sandmaier H., Lang W. Thermal flow sensor for liquids and gases based on combinations of two principles. Sensors and Actuators. 73:1999;7-13.
14. Cahill D.G. Thermal conductivity measurement from 30 to 750 K: the 3ω method. Review of Scientific Instruments. 61:(2):1990;802-808.