A pulsed mode micromachined flow sensor with temperature drift compensation

IEEE Transactions on Electron Devices

Volumn 47, Issue 2, 2000, Pages 340-347

  Okulan, Nihat ^a   Thurman Henderson, H ^a   Ahn, Chong H ^a  

^a University of Cincinnati   (United States)

Author keywords

Fluid flow measurements; Micromachining; Microsensors; Semiconductor devices

Indexed keywords

FLOW MEASUREMENT; FLUID DYNAMICS; FLUIDIC DEVICES; MICROMACHINING; SEMICONDUCTING ALUMINUM COMPOUNDS;

FLOW SENSORS; MICROFLUIDIC SYSTEMS;

MICROSENSORS;

EID: 0033887790     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.822278     Document Type: Article

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