Simulation of grazing-incidence synchrotron white beam X-ray topographic images of micropipes in 4H-SiC and determination of their dislocation senses

Journal of Electronic Materials

Volumn 37, Issue 5, 2008, Pages 713-720

  Chen, Yi ^a   Dudley, Michael ^a   Sanchez, Edward K ^b   MacMillan, Michael F ^b  

^a Stony Brook University   (United States)

^b DOW CORNING CORPORATION   (United States)

Author keywords

Dislocation sense; Micropipe; Silicon carbide; Synchrotron white beam X ray topography

Indexed keywords

DISLOCATION SENSE; MICROPIPES; SYNCHROTRON WHITE BEAM X-RAY TOPOGRAPHY;

COMPUTER SIMULATION; GEOMETRY; SILICON CARBIDE; SURFACE RELAXATION; TOPOGRAPHY; X RAYS;

IMAGE ANALYSIS;

EID: 42249114861     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-007-0314-2     Document Type: Conference Paper

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