Atomistic determination of continuum mechanical properties of ion-bombarded silicon

Journal of Engineering Materials and Technology

Volumn 127, Issue 4, 2005, Pages 457-461

  Kalyanasundaram, N ^a   Freund, J B ^b   Johnson, H T ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; ION BOMBARDMENT; MOLECULAR DYNAMICS; SILICON; SURFACE PHENOMENA;

ATOMISTIC DETERMINATION; ENERGY DENSITY; STRESS-STRAIN RELATIONS; SURFACE FEATURES;

CONTINUUM MECHANICS;

EID: 27744551586     PISSN: 00944289     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2020014     Document Type: Article

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