Grain size control by means of solid phase crystallization of amorphous silicon

Materials Research Society Symposium Proceedings

Volumn 989, Issue , 2007, Pages 139-144

  Farjas, Jordi ^a   Roura, Pere ^a   Roca i Cabarrocas, Pere ^b  

^a UNIVERSITY OF GIRONA   (Spain)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; GRAIN SIZE AND SHAPE; HEAT TREATMENT; NANOCRYSTALS; NUCLEATION;

AVRAMI THEORY; CONTROLLED DENSITY; THERMALLY CRYSTALLIZED FILMS;

AMORPHOUS SILICON;

EID: 41549149959     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0989-a06-17     Document Type: Conference Paper

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